動態干涉儀應用於量測薄膜之光學常數

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姓名

林育賢(Yu-Xen Lin) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

動態干涉儀應用於量測薄膜之光學常數
(Optical constants of thin-film measurement by a vibration-insensitive interferometer)

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摘要(中)

此篇論文研究是以架設偏振式Twyman–Green干涉儀，並搭配4D Technology公司出產的偏振像素攝影機，成功完成動態干涉量測系統之架設，量測功能可量測反射光譜與反射相位光譜，並透過窄帶濾光片選取所需的量測波長，得到多波長的量測資訊來分析。系統之反射光譜量測，其誤差為0.6 %，標準差為±0.172 %，反射相位光譜，其量測結果之誤差為1.26 %，標準差為±0.085 rad。
動態干涉儀利用程式上的一些修正，可以減少對於元件設備的品質，像是在光源強度不均勻的情況下與元件自我干涉也能透過程式校正，還原待測物的量測結果。而動態干涉儀使用的相位延遲元件，可透過Intensity Lissajou Curves橢圓的傾角來調整1/4波長相位延遲片的快慢軸角度，以修正參考光與待測光可被極化為圓偏振光，從而減少橢圓極化光的產生，進而減少相位計算中fringe print-through誤差的產生。因此利用以建構好的演算程式，可以將品質所造成的光學現象加以修正與調整，得以降低動態干涉儀在光學元件上使用的成本。
薄膜量測與橢圓偏振儀的量測結果作比較，將動態干涉儀所量測的反射光譜及反射相位光譜，透過simplex演算法擬合薄膜的厚度與折射率，即使在光學桌無防震狀態中量測，其量誤差皆小於1%。

摘要(英)

This article aims to set up a dynamic (vibration-insensitive) interferometry based on a polarized Twyman-Green interferometry with a polarization pixel camera produced 4D Technology Corporation.
In this research, detailed analyses of the uniformity white-light source and self-interference effect illustrates how these improvements increase the accuracy of the thin-film measurement. Through intensity Lissajou curves, the phase shift of wave-plate can be corrected to reduce fringe print-through error in the phase calculation process. The dynamic interferometry is capable to measure reflection amplitude and phase for mutli-wavelength by selecting different narrow band-pass filter. The reflection spectrum error of Ta2O5 thin-film is 0.6 % ( 0.172 %) and the reflection phase error is 1.26 % (0.085 rad).
An application of dynamic interferometry on transparent thin-film measurement was achieved. The measurements are compared with spectroscopic ellipsometry results (SOPRA GES 5), and for both film thickness and refractive index, the differences are within 1% of the ellipsometry measurement.

關鍵字(中)

★ 干涉儀
★ 四步相移
★ 光學常數

關鍵字(英)

★ Interferometer
★ phase shift
★ Optical constants

論文目次

摘要 I
Abstract II
致謝 III
第一章緒論 1
1-1 前言 1
1-1-1 相移式干涉儀 1
1-1-2 動態干涉量測技術 2
1-2 研究動機 5
1-3 本文架構 6
第二章理論 7
2-1 干涉儀理論 7
2-1-1 相位移干涉儀理論 8
2-1-2 動態干涉儀 12
2-2 薄膜理論 13
2-2-1 單層膜的反射與透射 14
2-2-2 單層膜與多層膜的膜矩陣 17
2-2-3單層膜與多層膜的反射率、穿透率及相位 19
2-3 演算法-Simplex最佳化求解 20
第三章實驗架構與研究方法 25
3-1 實驗架構 25
3-2 研究方法 27
3-2-1反射光譜量測 27
3-2-2反射相位光譜量測 29
3-3 橢圓偏振儀 31
第四章結果與討論 35
4-1系統校正 35
4-1-1強度校正 35
4-1-2相位校正 38
4-2實驗結果與討論 42
第五章結論 46
參考文獻 48

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指導教授

李正中(Cheng-Chung Lee)

審核日期

2016-8-29

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