| 摘要(英) |
This research use 75 micrometer platinum wire to be Anode, and separate each other by glass capillary tube. Sulfuric acid to be plating solution and Copper plate to be cathode. Because of some difference occur when both anode produced, which means there must have something different when you compare with each anode. So that the area of platinum explored to the solution might be different. That might cause the deposition rate different. No matter what kind of handmade way to produce anode, there must a little bit different between them. This research wants to change PWM value by CCD Camera detection to achieve same rate of deposition.
This research use one CCD Camera to build an auto plating system, Computed Threshold, Prewitt Operator, Sobel Operator, and so on to define column center. By control method PID adjust Arduino Switch PWM, Can efficiently attempt to same deposition rate and discuss with the robustness and stability. |
| 參考文獻 |
[1]John D. Madden and Ian W. Hunter “Three-Dimensional Microfabrication by Localized Electrochemical Deposition” VOL. 5, NO. 1, MARCH 1996
[2] Muller, F. Muller, and M. Hietschold, “Localized Electrochemical Deposition of Metals Using Micropipettes,” Thin Solid Films, 366, (2000), pp.32-36.
[3] R. P. Copeland ; Dept. of Electr. Eng., Wright State Univ., Dayton, OH, USA ; K. S. Rattan” A Fuzzy Logic Supervisor for PID Control of Unknown Systems”
[4]鄭家昇，「順滑模式應用於氣動馬達伺服平台之定位控制」，國立中央大學機械工程研究所碩士論文
[5]林彥州「適用於未知非線性多輸入多輸出系統之適應性PID容錯控制器」
國立成功大學電機工程學系碩博士班碩士論文
[6]C.S.Lin,C.Y.Lee,J.H.Yang,s.Hung,”Improved Copper Microcolumn Febricated by Localized Electrochemical Dposition”,Electrochemical and solid-State Letters(2005)C125-C129
[7]S.H.Yeo,J,H.Choo and K.S.Yip,”Localized eletorchemical Deposition-the growth behavior of nickel micro-columns”,Proc.SPIE4174(2000)30-9
[8 J.H YAng,J.C.Lin,T.K.Chang,G.Y.Lai and S.B Jiang.Micromech.Miroceng.18(2008)055023]
[9] J. D. Madden, S. R. Lafontaine, and I. W. Hunter, “Fabrication by Electrodeposition: Building 3D Structures and Polymer Actuators,” Sixth International Symposium on Micro Machine and Human Science, (1995). IEEE, pp. 77-81
[10] ]Y. Li, Y. Zheng, G. Yang, and L. Peng, “Localized electrochemical micromachining with gap control,” Sensors and Actuators A. 108(2003), pp. 144-148
[11] 邱永傑，「即時影像引導連續式微電鍍之立體結構製作研究」，國立中央大學機械工程研究所碩士論文
[12] R. A. Said, “Microfabrication by Localized Electrochemical Deposition Experimental Investigation and Theoretical Modelling,” Nanotechnology, (2003) pp.523-53 |
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