空間光調製器相移干涉術應用於薄膜量測

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姓名

陳秉儀(Ping-Yi Chen) 查詢紙本館藏

畢業系所

照明與顯示科技研究所

論文名稱

空間光調製器相移干涉術應用於薄膜量測
(Phase shifting interferometry with a spatial light modulator for thin film measurements)

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摘要(中)

本篇論文主要是架設一Twyman-Green干涉儀，並利用空間光調製器實現相移，完成一套相移干涉量測系統。實驗使用500、550、600、650和700 nm五個波長進行多波長分析，對標準片進行量測，量測高度為442.1 ± 2.7 nm，與標準皆高比較之誤差為1.03%。
多波長系統可以量測反射率光譜和分析反射相位，反射率光譜誤差為2.87%，標準差為0.08%；而反射相位光譜誤差為0.26%，標準差為0.055 rad。
本實驗利用程式消除光源照度不均和元件自我干涉的情形，還原物體表面強度分布，使得分析能夠更精確。利用簡形優化演算法，將反射率光譜和反射相位光譜代入適應函數做評比，得到薄膜折射率和厚度，誤差分別為0.10%和-0.46%。

摘要(英)

This article aims to set up a phase shifting interferometry(PSI) based on polarized Twyman-Green interferometry and applies spatial light modulator(SLM) as a phase-shifting manner. In research, we made a series of test to obtain relationship between phase shifting and gray level.
The PSI system use white light source and narrow band-pass filter to reach multi-wavelength measurement. We detailed the nonuniform illumination caused by white light source and self-interference effect. Then we proposed an improvement with uniform factor to reduce the error and illustrated the difference.
The PSI system is capable to measure the reflection amplitude and phase. Simplex algorithm can find the extreme value and help us to make thin film analysis to get material refractive index(n) and thin film thickness(d).
The step height error is 1.03%(442.1 ± 2.7 nm). The reflection spectrum error of Ta2O5 thin film is 2.87 %(±0.08 %) and the reflection phase error is 0.26 %(± 0.055 rad). The thin film thickness error is -0.46% and refractive index error is 0.10%.

關鍵字(中)

★ 相移干涉儀
★ 空間光調製器
★ 薄膜

關鍵字(英)

★ phase shifting interferometer
★ spatial light modulator
★ thin film

論文目次

摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vi
表目錄 vii
第一章緒論 1
1-1前言 1
1-1-1相移干涉術 1
1-1-2 空光調製器 2
1-2研究動機 4
1-3本文架構 4
第二章理論 6
2-1相移干涉理論 6
2-2 液晶與雙折射性質 10
2-3薄膜理論 11
2-3-1單層膜之反射與透射 12
2-3-2多層膜之反射與透射 16
2-4簡形優化法求最佳解 18
第三章實驗架構與研究方法 23
3-1實驗架構 23
3-2研究方法 25
3-2-1 SLM反應性量測 25
3-2-2反射光譜 29
3-2-3反射相位光譜 30
3-3橢圓偏振儀 33
第四章結果與討論 36
4-1系統校正 36
4-1-1強度校正 36
4-2實驗結果與討論 39
第五章結論 43
參考文獻 46

參考文獻

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指導教授

李正中(Cheng-Chung Lee)

審核日期

2017-8-25

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