以模糊理論為基礎之TFT-LCD廠的AMHS派送控制研究

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許智翔(Chih-Hsiang Hsu) 查詢紙本館藏

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論文名稱

以模糊理論為基礎之TFT-LCD廠的AMHS派送控制研究

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摘要(中)

隨著科技的日新月異，電子產品的應用日漸發達，生活中常見的電子設備如電視、手機、電腦、平板電腦皆使用TFT-LCD面板，以達到高畫質的表現。由於這些電子產品的市場需求非常大，因此也帶動TFT-LCD面板的需求大量增加。為了增加TFT-LCD面板的產量，TFT-LCD面板業者生產更大面積的玻璃基板，藉此增加面板的產量。大尺寸的玻璃基板仰賴更大世代的TFT-LCD製造廠製造。目前的生產技術將TFT-LCD廠推進到第八代。為了因應大量的需求，除了製造大型的玻璃基板外，提高玻璃基板的產量也能有效解決需求的問題。而TFT-LCD廠建置完成後，又要再提升其產量，就需要提升TFT-LCD廠內物料的流動效率。
由於第八代TFT-LCD廠之自動化物料搬運系統分為In-Line Stocker系統及RGV系統，因此派送問題涉及各系統間的派送控制及跨系統時的派送控制。In-Line Stocker系統中存在「Stacker Crane載取Cassette時的選取問題」及「Stacker Crane載取Cassette運送至出口點的控制問題」；RGV系統中則有「RGV載取Cassette時的選取問題」。本研究以模糊邏輯理論為基礎，將生產過程中的關鍵屬性搓合，發展模糊邏輯派送方法。利用模擬實驗觀察所提出的法則在不同績效指標下的表現，期望此派送方法能夠有效的改善TFT-LCD廠內的物料流動效率，並提升其生產效率。

摘要(英)

With the advancement of technology, the application of electronic products is increasingly developed, and TFT-LCD panels are commonly used in electronic devices such as televisions, smart phones, computers, and laptops for high image quality. The demand for these electronic products is very large, so the demand for TFT-LCD panels is also increasing. In order to increase the output of the panel, TFT-LCD panel manufacturers produce larger areas of glass substrates. Large-size glass substrates are manufactured by a larger generation of TFT-LCD manufacturers, and the current TFT-LCD factory is the eighth generation. After the TFT-LCD factory is builed, it is necessary to increase the flow efficiency of the materials in the TFT-LCD factory to increase the throughput.
The automated material handling system of the 8th generation TFT-LCD factory is divided into In-Line Stocker system and RGV system. The delivery problem involves delivery between systems and delivery across systems. In the In-Line Stocker system, there are Selection problem when Stacker Crane carries Cassette and Selection problem when Stacker Crane take Cassette to the exit point. In the RGV system, there is a Selection problem when RGV carries Cassette. This study combines key attributes in the production process and develops three fuzzy logic delivery methods based on fuzzy logic theory. The simulation experiment is used to observe the performance of the proposed rule under different performance indicators. It is expected that the proposed fuzzy delivery methods can effectively improve the material flow efficiency in the TFT-LCD plant and improve its production efficiency.

關鍵字(中)

★ TFT-LCD
★ 自動化物料搬運系統
★ 模糊邏輯理論

關鍵字(英)

★ TFT-LCD
★ Automated material handleing system
★ Fuzzy logic theory

論文目次

摘要 i
Abstract ii
目錄 iii
圖目錄 v
表目錄 vii
第一章緒論 1
1.1 研究背景與動機 1
1.2 自動化物料搬運系統（AMHS） 2
1.3 研究目的 3
1.4 研究環境與假設 3
1.5 研究架構 4
第二章文獻探討 6
2.1 TFT-LCD的基本介紹 6
2.2 TFT-LCD的製程介紹 7
2.3 TFT-LCD廠自動化物料搬運系統介紹 11
2.4 TFT-LCD廠與半導體晶圓廠AMHS派送控制文獻探討 15
2.5 具有存儲和運送功能的S/R MACHINE派送控制相關文獻探討 22
2.6 無人搬運車派送控制相關文獻探討 25
第三章研究設計與研究方法 31
3.1 問題分析 31
3.2 研究環境 32
3.3 TFT-LCD生產系統說明 34
3.4 AMHS作業流程 37
3.4.1 Intrabay系統之Stacker Crane作業流程 38
3.4.2 Interbay系統之RGV作業流程 46
3.5 AMHS派送控制方法 56
3.5.1 模糊邏輯控制方法 56
3.5.2 Stacker Crane之Cassette選取法則 62
3.5.3 Stacker Crane之出口點選擇法則 63
3.5.4 RGV之Cassette選取法則 64
第四章實驗結果與分析 65
4.1 實驗設計 65
4.1.1 實驗環境 66
4.1.2 實驗環境設定 68
4.1.3 環境假設 68
4.1.4 模擬實驗因子 69
4.1.5 實驗績效評估指標 71
4.2 統計分析 72
4.2.1 依「系統總產出量（Total Throughput）」為績效評估指標 73
4.2.2 依「平均流程時間（Average Flow Time）」為績效評估指標 80
4.2.3 依「平均延遲時間（Average Lateness）」為績效評估指標 89
4.2.4 依「平均遲到時間（Average Tardiness）」為績效評估指標 97
4.2.5 依「平均提早時間（Average Earliness）」為績效評估指標 106
4.3 實驗結論 114
第五章結論與後續建議 116
5.1 研究結論 116
5.2 未來研究建議 117
參考文獻 118

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http://www.innolux.com/Pages/TW/Technology_TW.html
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3. 村田機械，2018，無塵室自動化，Retrieved June 1，2018，from
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指導教授

何應欽(Ying-Chin Ho)

審核日期

2018-7-25

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