利用化學還原合成奈米金粒子製備遮罩之濕蝕刻石英奈米結構

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王銘倫(Ming-lun Wang) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

利用化學還原合成奈米金粒子製備遮罩之濕蝕刻石英奈米結構
(Wet etch of nanostructures on quartz by chemical synthesized gold nanoparticle mask)

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摘要(中)

微奈米結構近年來的應用相當廣泛，如太陽能面板上的奈米多孔結構、氣體感測元件上的奈米線結構、生醫載體上的奈米孔洞結構等。而石英材料在半導體領域上有著不可取代的獨特性質，故在石英材料上製作出微奈米結構，其發展性相當高。常見的微結構製作方式大多會運用到昂貴的設備及複雜的製程；而濕蝕刻的方式在石英上製作微奈米結構，其方法相較於乾蝕刻，有更快速、簡單、便宜之優勢。
本研究利用直接還原法合成出奈米金粒子，並利用化學方式將其沉積在石英表面上，再對石英表面進行熱退火處理、鍍白金處理，增加奈米金粒子在石英上的附著性並將其做為濕蝕刻之遮罩，以飽和氟化氫銨在恆溫30℃的條件下進行蝕刻，最終目地為在石英上製作出微奈米結構。
我們將探討沉積時間與熱退火對奈米金粒子粒子的形貌影響，並以奈米金粒子微遮罩濕蝕刻而成之微奈米石英結構，進行高度、輪廓、面積的討論，期許能夠在石英微奈米結構之應用發展上做出貢獻。

摘要(英)

Nano-microstructures have been widely utilized in recent years, such as the nanoporous structure on the solar panels, the nanowire structure on the gas sensor elements, and the nanopore structure on biomedical carriers. Quartz materials have irreplaceable values and unique feature in the semiconductors field, so manufacturing Nano-microstructures on quartz is developmental. Most of nano-microstructures process will demand expensive equipment and complicated processes. However, adopting the wet etching process on quartz to make Nano-microstructures is faster, simpler, and cheaper than dry etching.
This research used chemical reduction method to synthesis the gold nanoparticle, and use chemical method to deposit it on the quartz, then proceed thermal annealing and coating platinum on the quartz surface, to increase the adherence as the mask for wet etching on the quartz that we control the etching tempeture on 30 ℃ during the process.
We will discuss the influence of deposition time and thermal annealing on the morphology of gold nanoparticle, and produce nano-microstructures on quartz by wet etching which using gold nanoparticle for mask. Finally, conduct height, profile, and area discussion. We expect that we can create contribution to the quartz nano-microstructures application and development.

關鍵字(中)

★ 石英
★ 奈米結構
★ 金粒子遮罩
★ 濕蝕刻

關鍵字(英)

★ quartz
★ nanostructures
★ gold particle
★ mask
★ wet etch

論文目次

摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vi
表目錄 xii
第一章緒論 1
1-1 研究背景 1
1-2 文獻回顧 2
1-2-1 石英之非等向性蝕刻 2
1-2-2 微結構應用 6
1-2-1 金奈米粒子合成與應用 10
1-3 研究動機與目的 13
1-4 論文架構 14
第二章基礎理論 15
2-1 石英晶格結構及特性 15
2-2 石英切割方向 16
2-3 石英蝕刻技術 17
2-4 微結構製造技術 19
2-5 奈米金粒子合成 20
2-6 熱退火機制 21
第三章研究方法 22
3-1 研究架構 22
3-2 實驗步驟 23
3-2-1 蝕刻速率計算 25
3-2-2 晶圓清洗 29
3-2-3 製備奈米金粒子溶液 30
3-2-4 沉積奈米金粒子 30
3-2-5 熱退火 31
3-2-6 蝕刻液配製 31
3-2-7 濕蝕刻 32
3-2-8 試片量測 33
第四章結果與討論 35
4-1 蝕刻速率計算 35
4-2 沉積奈米金粒子 40
4-3 熱退火奈米金粒子 46
4-4 石英之濕蝕刻 49
4-4-1 金粒子遮罩未熱退火處理與熱退火處理之蝕刻 49
4-4-2 金粒子遮罩鍍白金薄膜處理之蝕刻結構 51
第五章結論與未來展望 64
5-1 結論 64
5-2 未來展望 65
參考文獻 66

參考文獻

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指導教授

洪銘聰(Ming-tsung Hung)

審核日期

2019-7-26

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