以電鍍法製備鈷鐵鎳合金三維微結構及其特性之研究

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姓名

Guan-Xun(Wu) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

以電鍍法製備鈷鐵鎳合金三維微結構及其特性之研究
(Fabrication of Three-Dimensional Co-Fe-Ni Alloying Micro-Features by Electroplating and their Characterization)

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摘要(中)

本研究以微陽極導引電鍍法製作鈷鐵鎳合金三維結構物。在電鍍製程中，改變的實驗參數為鍍液中硫酸鈷濃度(0.04 M ~ 0.10 M)，硫酸鎳濃度(0.30 M ~ 0.60 M)以及pH值(2.3~4.3)等條件。先利用電鍍三元合金微柱來找出最佳的析鍍參數，最後進行微螺旋的電鍍實驗。而利用改變參數來探討析鍍出鈷鐵鎳合金微柱的表面形貌，機械性質，耐蝕性以及磁特性之影響。而利用場發式電子顯微鏡來進行表面形貌之觀測;利用奈米壓痕儀器量測鈷鐵鎳合金微柱之楊氏模數與硬度;耐蝕性則是將微柱浸泡在3.5 wt.% NaCl水溶液中，利用恆電位儀進行電化學試驗比較其腐蝕行為。
而結果顯示，當固定鍍液中硫酸鈷濃度0.10M，硫酸鎳濃度0.304M，pH=3.3時，能夠得到最佳磁特性1.9 T及極佳之硬度6.46 GPa ，其線性阻抗值與腐蝕電流性能為386 Ohm、3.07×10-5 A/cm2 ，且將pH上升至3.3時，能夠有效地增加析度速率，故較適合為螺旋之析鍍參數。
析鍍微螺旋時，實驗參數有製程參數(重複次數2、3、4)以及改變析度角度(30∘、50∘)，而利用場發式電子顯微鏡來進行表面形貌之觀測並探討微螺旋之螺距與螺旋長度變化。可以發現當析度角度越大時，螺旋之螺距的增加量會明顯下降，且微螺旋之長度會因為製程參數之增加而隨之上升。
關鍵字: 微陽極導引電鍍，鈷鐵鎳合金，磁特性。

摘要(英)

In this study, the cobalt-iron-nickel (CoFeNi) ternary alloy was fabricated by microanode guided electroplating (MAGE). In the electroplating, the experimental parameters of cobalt sulfate concentration (0.040 ~ 0.100 M), nickel sulfate concentration (0.30 ~ 0.60 M), and pH value (2.3 ~ 4.3) have been studied. The optimum parameter of applied voltage, the gap between microanode and cathode, the concentration of metal ions, and pH value of bath had been investigated, and then the optimal parameters were applied for producing 3D micro-helical alloy.
The surface morphology, mechanical properties, corrosion resistance, and magnetic properties of the CoFeNi ternary alloy microcolumns were analyzed by the FE-SEM, Nano-indentor, potentiostat, and vibrating sample magnetometer (VSM).
The results showed that the lowest saturation induction intensity reached 1.9 T and the outstanding hardness was 6.46 GPa as the concentration of cobalt sulfate at 0.10 M, nickel sulfate at 0.30 M, and the pH at 3.3. The corrosion resistance is 386 Ohm, and the corrosion current density was 30.7 μA/cm2. When the pH at 3.3, the electroplating rate was increased obviously. Therefore, this condition is more suitable for plating the CoFeNi micro-helical structure.
When electroplating a micro-helical, the experimental parameters are process parameters (repetition times 2, 3, 4) and changing the angle of resolution (30, 50 ). The FE-SEM was used to observe the surface morphology and the length of the microhelices. The results showed that when the electroplating angle was increased, the increment of the pitch of the helix will decrease. In addition, the length of the microhelix will increase due to the increase of the repetition time.
Keywords: Microanode guided electroplating, Cobalt-iron-Nickel alloy, magnetic property.

關鍵字(中)

★ 微陽極導引電鍍
★ 鈷鐵鎳合金
★ 磁特性

關鍵字(英)

★ Microanode guided electroplating
★ Cobalt-iron-Nickel alloy
★ magnetic property

論文目次

摘要 i
Abstract i
致謝 ii
目錄 iv
表目錄 viii
圖目錄 ix
第一章、前言 1
1.1 研究背景 1
1.2 研究動機 2
第二章、文獻回顧與基礎原理 3
2.1 國外微電鍍製程之發展 3
2.2 國內微電鍍製程之發展 5
2.3 電鍍原理 6
2.4 合金電鍍 7
2.5 奈米壓痕測試材料之硬度與楊氏模數 9
2.6 材料的磁特性 10
2.6.1 鈷鐵鎳三元合金磁性的起因 10
2.6.2 鐵磁性材料之磁區結構 11
2.6.3 磁性材料的評估依據 12
第三章、實驗方法 14
3.1 實驗流程 14
3.2 實驗儀器 14
3.2.1 實驗設備 14
3.3 陰陽極製備 16
3.4 鍍浴組成 16
3.5 微陽極導引電鍍法 17
3.5.1 單軸式 17
3.5.2 四軸式 17
3.6 實驗步驟 18
3.6.1 鈷鐵鎳三元合金微柱的表面形貌觀察與組成分析 18
3.6.2 陰極極化曲線量測 19
3.6.3 Comsol電場模擬方式與設定 19
3.6.3.1 微柱之電場模擬 19
3.6.3.2 微螺旋之電場模擬 20
3.6.4 晶體結構分析 20
3.6.5 抗蝕性能量測 20
3.6.6 奈米壓痕試驗 21
3.6.7 磁特性分析 21
第四章、結果 23
4.1 SEM表面形貌之結果 23
4.1.1 析鍍鈷鐵鎳合金微柱 23
4.1.2析鍍鈷鐵鎳合金微螺旋 24
4.2 改變鍍液參數對成分組成之結果 26
4.2.1 改變硫酸鈷濃度 26
4.2.2 改變硫酸鎳濃度 27
4.2.3 改變鍍液pH值 27
4.3 COMSOL模擬軟體結果 28
4.3.1 析鍍微柱 28
4.3.2 析鍍微螺旋 29
4.4 平均電流與析度速率 30
4.4.1 改變硫酸鈷濃度 30
4.4.2 改變硫酸鎳濃度 31
4.4.3 改變鍍液pH值 31
4.5 極化曲線量測 31
4.6 X光繞射分析 32
4.6.1 改變硫酸鈷濃度 32
4.6.2 改變硫酸鎳濃度 32
4.6.3 改變鍍液pH值 32
4.7 奈米壓痕量測 33
4.7.1 改變硫酸鈷濃度 33
4.7.2 改變硫酸鎳濃度 33
4.7.3 改變鍍液pH值 34
4.8 磁特性分析 34
4.8.1 改變硫酸鈷濃度 34
4.8.2 改變硫酸鎳濃度 35
4.8.3 改變鍍液pH值 35
4.9 電化學分析 36
4.9.1 線性極化量測 36
4.9.2 塔弗極化量測 36
第五章、討論 38
5.1 微柱製程參數之影響 38
5.1.1 鍍液參數對微柱組成之討論 38
5.1.2 極化曲線之討論 39
5.1.3 抗蝕性能之討論 39
5.1.4 機械性質之討論 40
5.1.5 磁特性之討論 40
5.2 鈷鐵鎳三元合金微螺旋製程參數之影響 41
第六章、結論與未來展望 43
參考文獻 45

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指導教授

林景崎(Jing-Chie Lin)

審核日期

2019-8-21

推文