3-D曲面玻璃之鍍膜均勻性

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姓名

莊天仁(Tien-Jen Chuang) 查詢紙本館藏

畢業系所

照明與顯示科技研究所

論文名稱

3-D曲面玻璃之鍍膜均勻性
(Coating uniformity of 3-D curved glass)

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至系統瀏覽論文 (2025-1-1以後開放)

摘要(中)

近年來隨著智慧型產品蓬勃發展，以3-D曲面型玻璃為顯示器的智慧型裝置逐漸成為趨勢，而在非平面物體上的光學薄膜製鍍過程會因為薄膜厚度的差異導致色差產生。本研究目的在對於3-D曲面玻璃探討光學薄膜分布，利用行星式旋轉基板支撐架並且使用電子束蒸鍍腔，分別蒸鍍Ta2O5與SiO2兩種材料，從蒸發源與基板的幾何關係及蒸發源發射特性來對膜厚分佈建立關係式，亦有不同傾斜角度所造成不同的均勻性變化，並找出較佳均勻性的傾斜角度，再利用關係式所的到結果進行模擬，並且沉積4層抗反射膜於3-D曲面玻璃，再藉由量測分析光譜穿透率。

摘要(英)

In recent years, as the rapid development of smart devices, the applications of 3-D curved glass on display have become a trend gradually. The optical film deposited on the 3-D curved glass performs color differences due to the difference in the film thickness. The purpose of this research is to study the distribution of optical films on the 3-D curved glass. The electron beam evaporation coater was with a planetary rotating substrate holder used to deposit two materials, Ta2O5 and SiO2. From the geometric relationship between the evaporation source and the substrate holder, the film thickness distribution was calculated. The different inclined angles of the substrate angle were analyzed to achieve a better thin film uniformity. Finally, a 4-layer anti-reflected coating was deposited on the 3-D curved glass, and the spectral transmittance is with good uniformity.

關鍵字(中)

★ 電子束蒸鍍
★ 3-D曲面玻璃
★ 行星式式旋轉基板支撐架
★ 均勻性
★ 抗反射膜

關鍵字(英)

★ Electron beam evaporation coater
★ 3-D curved glass
★ Planetary rotating substrate holder
★ Uniformity
★ Anti-reflected coating

論文目次

摘要 i
Abstract ii
誌謝 iii
目錄 iv
圖目錄 vii
第一章緒論 1
1-1 前言 1
1-2 研究動機與目的 3
第二章理論分析 4
2-1 膜厚分布分析 4
2-1-1 點源膜厚理論 4
2-1-2 面源膜厚理論 6
2-2 各型旋轉基板支撐架推導 7
2-2-1 傾斜型平面旋轉基板支撐架 7
2-2-2 傾斜型行星式旋轉支撐架 11
2-2-3 基板傾斜面朝公轉中心型行星式旋轉支撐架 15
第三章實驗儀器與方法 20
3-1 雙電子鎗蒸鍍設備與離子源輔助蒸鍍系統 20
3-2 光譜量測儀 21
3-3 3-D曲面玻璃曲率量測 22
3-4 實驗流程 23
3-5 實驗步驟 24
第四章實驗結果與分析 26
4-1蒸發源發射特性 26
4-2 Ta2O5 膜厚分布之探討 27
4-2-1 Ta2O5蒸發源發射特性N值之實驗與模擬結果比較 27
4-2-2 Ta2O5行星式旋轉基板之單層膜實驗值與模擬值比較 30
4-3 SiO2 膜厚分布之探討 33
4-3-1 SiO2蒸發源發射特性N值之實驗與模擬結果比較 33
4-3-2 SiO2行星式旋轉基板之單層膜實驗值與模擬值比較 37
4-4 抗反射膜設計 40
4-5 四層抗反射膜設計與沉積結果 41
第五章結論 53
參考文獻 54

參考文獻

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指導教授

陳昇暉(Sheng-Hui Chen)

審核日期

2020-1-15

推文