太空用光學薄膜研究

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姓名

陳宏彬(Hung-Pin Chen) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

太空用光學薄膜研究
(Research of Optical Thin Film for Space)

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摘要(中)

遙測酬載儀器主要分為電子單元(EU)及遙測取像儀(Telescope)，遙測取像儀中包含了重要的光學元件，其中光學主、次鏡與帶通濾光鏡陣列，需要高精密度的鍍膜技術才得以完成。本文利用離子源輔助電子束蒸鍍系統進行多層膜之製程，提高膜層製作之穩定度與薄膜光學品質以符合太空上之規格，並輔以高精度光學監控光學薄膜製程厚度，以提高帶通濾光鏡穩定性、良品率，降低人工及物料成本，利用Macleod薄膜軟體成功設計出符合太空規格之薄膜堆疊設計，並利用微圖化方式進行製鍍光學薄膜，成功製鍍出間距700~800µm線寬之濾光鏡，改善邊緣遮蔽效應，並進行製鍍PAN filter與B1-B4 filter，其通帶平均穿透率為80％以上，止帯之平均穿透率皆在0.5％以下。並進行與通過太空環境檢測。大口徑銀鏡膜層設計利用Macleod薄膜設計模擬軟體進行保護層的最佳化設計，使保護層做了提升銀鏡反射率的設計，並利用大口徑光學玻璃清洗機與大口徑精密光學鍍膜機進行製鍍，製鍍出反射率、附著力佳，且能有效抵抗環境影響產生硫化變質或氧化變黑的銀反射鏡，保護層如預期地提升了反射率，使450nm～900nm平均反射率達98.5%。

摘要(英)

Remote sensing instrument are mainly divided into electronic units (EU) and telescope imagers (Telescope). The telescope contain important optical components, optical primary, secondary mirrors and bandpass filter arrays, which require high precision coating technology. In this paper, The IBAD technique has been used to improve the optical properties of the films, to determine the optical stability of optical thin films for aerospace applications, supplemented by high-precision optical monitoring of the thickness of the optical film process to improve the band pass filter stability, good product rate, reduce labor and costs. Using the Macleod thin film software to designed thin film stacks that meets the space specifications, and used micro-patterning to produce optical films, the interval between filters is 700~800µm. The PAN filters and B1-B4 filters is plated and the average transmittances are above 80% for all five band-pass filters, with a rejection transmittance below 0.5%, and pass the space environment testing. The thin films stack of large silver mirror designed by the Macleod thin film design software. It optimized the protective layer to enhance the reflectivity of the silver mirror. The mirror is manufactured by a large diameter cleaner and a large diameter precision optical coater. The mirror with good reflectivity and adhesion, and which can resist environmental influences avoid sulfidation or oxidation. The protective layer enhances the reflectance of 450nm to 900nm to 98.5% .

關鍵字(中)

★ 離子束製程技術
★ 太空用光學薄膜
★ 擇區微圖化製程
★ 輻射(伽瑪射線)測試

關鍵字(英)

論文目次

摘要.............................................................................................................i
目錄...........................................................................................................iii
圖目錄........................................................................................................v
表目錄.....................................................................................................viii
第一章　前言............................................................................................1
1.1 研究背景......................................................................................1
1.2 研究動機與研究架構..................................................................3
第二章　基本理論....................................................................................8
2.1 太空環境......................................................................................8
2.2 色心............................................................................................20
2.3 離子束製程技術........................................................................22
第三章　研究方法..................................................................................28
3.1 實驗方法....................................................................................28
3.2 實驗設備....................................................................................30
3.2.1 電子束蒸鍍系統................................................................30
3.2.2 離子束助鍍系統................................................................33
3.3 量測儀器....................................................................................36
3.3.1 UV/NIR分光光譜儀.........................................................36
3.3.2 掃描式電子顯微鏡............................................................37
3.3.3 穿透式電子顯微鏡............................................................39
3.3.4 能量散射光譜儀................................................................40
3.3.5 橢偏儀................................................................................42
第四章　結果與討論..............................................................................47
4.1 玻璃基板輻射損傷測試............................................................47
4.2 光學多層膜濾光鏡薄膜設計....................................................54
4.3 濾光片製鍍與擇區微圖化製程................................................58
4.3.1 濾光片製鍍........................................................................58
4.3.2 濾光片擇區微圖化製程....................................................60
4.4 太空用光學薄膜輻射(伽瑪射線)測試.....................................66
4.5 太空用大口徑銀鏡製鍍............................................................70
第五章　結論..........................................................................................73
參考文獻..................................................................................................75

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指導教授

李正中

審核日期

2020-7-23

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