參考文獻 |
[1] G. Jaeger, “Three-Dimensional Nanopositioning, Nanomeasuring Machine with a Resolution of 0.1 nm”, Optoelectronics, Instrumentation and Data Processing, Vol. 46, pp.318-323, 2010.
[2] W.D. Pozzo, “Inference of cosmological parameters from gravitational waves: Applications to second generation interferometers”, Physical review. D, Particles and fields, Vol. 86, pp.3011, 2011.
[3] G. Raina, “Atomic Force Microscopy as a Nanometrology Tool: Some Issues and Future Targets”, Journal of Metrology Society of India, Vol. 28, pp.311-319, 2013.
[4] J.C. Lee, K.I. Lee, S.H. Yang, “Development of compact three-degrees-of-freedom compensation system for geometric errors of an ultra-precision linear axis”, Mechanism and machine theory, Vol. 99, pp.72-82, 2016.
[5] R. Ramesh, M.A. Mannan, and A.N. Poo, “Error compensation in machine tools — a review Part I: geometric, cutting-force induced and fixture-dependent errors”, International journal of machine tools & manufacture, Vol. 40, pp.1235-1256, 2000.
[6] F. Viprey, H. Nouira, S. Lavernhe, and C. Tournier, “Novel multi-feature bar design for machine tools geometric errors identification”, Precision engineering, Vol. 46, pp.323-338, 2016.
[7] K.K. Tana, S.N. Huang, T.H. Lee, “Dynamic S-function for geometrical error compensation based on neural network approximations”, Measurement, Vol. 34, pp.143-156, 2003.
[8] H.F.F. Castro, and M. Burdekin, “Dynamic calibration of the positioning accuracy of machine tools and coordinate measuing machines using a laser interferometer” International journal of machine tools & manufacture, Vol. 43, pp.947-954, 2003.
[9] P. Rabinowitz, S. F. Jacobs, T. Shultz, and G. Gould, “Cube-corner Fabry-Perot interferometer”, Journal of the Optical Society of America, Vol. 52, pp.452-453, 1962.
[10] K. A. R. B. Pietraszewski, “Recent Developments in Fabry-Perot Interferometer”, ASP Conference Series, Vol. 195, pp.591-596, 2000.
[11] J. R. Lawall, “Fabry-Perot metrology for displacements up to 50 mm”, Journal of the Optical Society of America. A, Optics, image science, and vision, Vol. 22, pp.2786-2798, 2005.
[12] Y.C. Wang, L.H. Shyu, and C.P. Chang, “The Comparison of Environmental Effects on Michelson and Fabry-Perot Interferometers Utilized for the Displacement Measurement”, Sensors, Vol. 10, pp.2577-2586, 2010.
[13] J.M. Vaughan, “Fabry–Perot interferometer history theory practice and applications”, Adam Hilger, pp. 1-43, 1989.
[14] Renishaw XL-80 Laser Measurement System. Available online: https://www.renishaw.com/media/pdf/en/5d15dd21874642ba986dbdefb6ede174.pdf (accessed on 3 June 2020).
[15] Keysight Technologies 5530 Dynamic Calibrator. Available online: https://www.keysight.com/main/redirector.jspx?action=ref&cname=EDITORIAL&ckey=1750511& c=cht&cc=TW&nfr=-536900386.0.00 (accessed on 3 June 2020).
[16] Renishaw XM-60 Multi-Axis Calibrator. Available online: http://resources.renishaw.com/en/details/brochure-xm-60-multi-axis-calibrator--111830 (accessed on 3 June 2020).
[17] Q. Huang, X. Liu, and L. Sun, “Homodyne laser interferometric displacement measuring system with nanometer accuracy”, In Proceedings of the Ninth International Conference on Electronic Measurement & Instruments, Beijing, China, 16–19, August 2009.
[18] W.Y. Jywe, T.H. Hsieh, P.Y. Chen, and M.S. Wang, “An Online Simultaneous Measurement of the Dual-Axis Straightness Error for Machine Tools”, Applied Sciences, Vol. 8, Issue 11, 2018.
[19] T.H. Hsieh, P.Y. Chen, W.Y. Jywe, G.W. Chen, and M.S. Wang, “A Geometric Error Measurement System for Linear Guideway Assembly and Calibration”, Applied Sciences, Vol. 9, Issue 3, 2019.
[20] A. Sacconi, G.B. Picotto, and W. Pasin, “The IMGC Calibration Setup”, IEEE Transactions on Instrumentation and Measurement, Vol. 48, pp.385-386, 1999.
[21] L. Bruno, P. Mainieri, and A. Poggialini, “Design and calibration of a low-cost open-loop PZT actuator for phase-shifting speckle interferometry”, Proc. of SPIE, Vol. 4933, pp.317-322, Speckle Metrology 2003.
[22] L. Bruno, A. Poggialini, and G. Felice, “Design and calibration of a piezoelectric actuator for interferometric applications”, Optics and Lasers in Engineering, Vol. 45, Issue 12, pp.1148–1156, 2007.
[23] F.D.A.A Barbosa, G. Nader, R.T. Higuti, and C. Kitano, “A Simple Interferometric Method To Measure The Calibration Factor And Displacement Amplification In Piezoelectric Flextensional Actuators”, Revista Controle & Automação, Vol. 21, pp.577–587, 2010.
[24] K.A. Murphy, M.F. Gunther, A.M. Vengsarkar, R.O. Claus, “Quadrature phase-shifted, extrinsic Fabry–Perot optical fiber sensors”, Optics Letters, Vol. 16, No. 4, pp. 273–275, 1991.
[25] L. H. Shyu, Y. C. Wang, C. P. Chang, P. C. Tung, and E. Manske, “Investigation on displacement measurements in the large measuring range by utilizing multibeam interference”, Sensor Letter, Vol. 10, pp. 1109-1112, 2012.
[26] C.P. Chang, P.C. Tung, L.H. Shyu, Y.C. Wang, and E. Manske, “Fabry-Perot displacement interferometer for the measuring range up to 100 mm”, Measurement, Vol. 46, pp. 4094-4099, 2013.
[27] Y.C. Wang, L.H. Shyu, C.P. Chang, H.T. Shih and E. Manske, “A Signal Interpolation Method for Fabry-Perot Interferometer Utilized in Mechanical Vibration Measurement”, Measurement, Vol. 92, pp. 83-88, 2016.
[28] C.P. Chang, P.C. Tung, L.H. Shyu, Y.C. Wang, and E. Manske, “Modified Fabry-Perot interferometer for displacement measurement in ultra large measuring range”, Review of Scientific Instruments, Vol. 84, pp. 053105, 2013.
[29] J.E. Griffith, “Dimensional metrology with scanning probe microscopes”, Journal of Applied Physics, Vol. 74, Issue 9, 1993.
[30] G. Raina, “Atomic Force Microscopy as a Nanometrology Tool: Some Issues and Future Targets”, Journal of Metrology Society of India, Vol. 28, Issue 4, pp. 311-319, 2013.
[31] W.D. Pozzo, “Inference of cosmological parameters from gravitational waves: Applications to second generation interferometers”, Physical review D: Particles and fields, Vol. 86, Issue 4, pp. 3011, 2011.
[32] API XD LASER. Available online: https://apimetrology.com/machine-tool-brochure-form/213 (accessed on 3 June 2020).
[33] Y.T. Chen, W.C. Lin, C.S. Liu, “Design and experimental verification of novel six-degree-of freedom geometric error measurement system for linear stage”, Optics and lasers in engineering, Vol. 92, pp. 94-104, 2017.
[34] S. Shimizu, H.S. Lee, and N. Imai, “Simultaneous measuring method of table motion errors in 6 degrees of freedom”, International Journal of the Japan Society for Precision Engineering, Vol. 28, pp. 273-274, 1994.
[35] J. Ni, P.S. Huang, and S.M. Wu, “A multi-degree-of-freedom measurement system for CMM geometric errors”, Journal of Manufacturing Science and Engineering, Vol. 114, Issue 3, pp. 362-369, 1992.
[36] P.S. Huang, J. Ni, “On-line error compensation of coordinate measuring machine”, International Journal of Machine Tools and Manufacture, Vol. 35, Issue 5, pp. 725-738, 1995.
[37] K.C. Fan, and M.J. Chen, “A 6-degree-of-freedom measurement system for the accuracy of XY stages,” Precision engineering, Vol. 24, Issue 1, pp. 15-23, 2000.
[38] K.C. Fan, M.J. Chen, and W. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” International Journal of Machine Tools and Manufacture, Vol. 38, Issue 3, pp. 155-164, 1998.
[39] C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sensors and Actuators A: Physical, Vol. 125, Issue 1, pp. 100-108, 2005.
[40] L.H. Shyu, C.P. Chang, Y.C. Wang, “Influence of Intensity Loss in the Cavity of a Folded Fabry-Perot Interferometer on Interferometric Signals”, Review of Scientific Instruments, Vol. 82, pp. 063103, 2011.
[41] Y.C. Wang, L.H. Shyu, P.C Tung, H.T. Shih, J.C. Lin, B.Y. Lee, and J.S. Li, “Optimization of the optical parameters in Fabry-Perot interferometer”, Ilmenau Scientific Colloquium, Vol. 59, 2017.
[42] Y.C. Shih, P.C. Tung, W.Y. Jywe, C.P. Chang, L.H. Shyu, and T.H. Hsieh, 2020, Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors, Applied sciences, Vol. 10, No. 18, pp. 6191.
[43] J. Cui, Z. He, Y. Jiu, J. Tan, and T. Sun, “Homodyne laser interferometer involving minimal quadrature phase error to obtain subnanometer nonlinearity”, Applied Optics, Vol. 55, 2016.
[44] T. Keem, S. Gonda, I. Misumi, Q. Huang, and T. Kurosawa, “Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems”, Applied Optics, Vol. 43, Issue 12, pp. 2443-2448, 2004.
[45] P. Hu, J. Zhu, X. Zhai, and J. Tan, “DC-offset-free homodyne interferometer and its nonlinearity compensation”, Optics EXPRESS, Vol. 23, Issue 7, pp. 8399-8408, 2015.
[46] P. L. M. Heydemann, “Determination and correction of quadrature fringe measurement errors in interferometers”, Applied Optics, Vol. 20, Issue 19, pp. 3382-3384, 1981.
[47] T.B. Eom, J.Y. Kim and K. Jeong, “The dynamic compensation of nonlinearity in a homodyne laser interferometer”, Measurement Science and Technology, Vol. 12, pp. 1734-1738, 2001.
[48] H.T. Shih, P.C. Tung, Y.C. Wang, L.H. Shyu, C.P. Chang, E. Manske, B.Y. Lee, and J.C. Lin, 2018, Measurement module based on a common-path Fabry-Pérot interferometer for determining three-degree-of-freedom motion parameters, euspen’s 18th International Conference & Exhibition, Venice, Italy.
[49] International Standard: ISO230-1, “Test Code for Machine Tools-Part 1: Geometric accuracy of machines operating under no-load or quasi-static conditions”, Third edition, 2012.
[50] H.T. Shih, P.C. Tung, Y.C. Wang, L.H. Shyu, and C.P. Chang, 2018, “five-degree-of-freedom measurement system based on a common-path Fabry-Perot laser interferometer”, International Conference on Smart Sensors and 21st Nano Engineering and Microsystem Technology Conference, Fullon Hotel, Shenkeng District, Taipei.
[51] Y.C. Shih, P.C. Tung, Y.C. Wang, L.H. Shyu, and M. Eberhard, 2020, Linear Displacement Calibration System Integrated with a Novel Auto-Alignment Module for Optical Axes, Sensors, Vol. 20, No. 9, pp. 2462.
[52] International Standard: ASTM-E2309, “Standard Practices for Verification of Displacement Measuring Systems and Devices Used in Material Testing Machines”, Reapproved 2011.
[53] International Standard: ISO230-2, “Test for Machine Tools-Part 2: Determination of Accuracy and Repeatability of Positioning Numerically Controlled Axes”, Third edition, 2006.
[54] Measurement Computing DAQ USB-2537. Available online: http://www.mccdaq.com/usb-data acquisition/USB-2537.aspx (accessed on 24 December 2020).
[55] H.T. Shih, Y.C. Wang, L.H. Shyu, P.C Tung, C.P. Chang, W.Y. Jywe, and J.H. Chen, “Automatic calibration system for micro-displacement devices”, Measurement Science and Technology, Vol. 29, pp. 084003, 2018.
[56] Lih-Horng Shyu, Yung-Cheng Wang, Chung-Ping Chang, Hung-Ta Shih, Eberhard Manske, 2016, “A signal interpolation method for Fabry–Perot interferometer utilized in mechanical vibration measurement”, Measurement, Vol.92, Pages 83-88. |