脈衝複合偏壓電化學放電加工石英晶圓之研究

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姓名

劉柏億(Po-Yi Liu) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

脈衝複合偏壓電化學放電加工石英晶圓之研究
(Research on Pulsed compound Bias Voltage Electrochemical Discharge Machining Quartz Wafer)

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摘要(中)

本研究是採用直徑55 μm之碳化鎢圓柱作為工具電極對石英晶圓材料進行脈衝複合偏壓電化學放電鑽孔之研究，進行一系列加工特性之研究，期望獲得較佳之加工能力與較小擴孔量。本研究採用電化學放電鑽孔時，藉由脈衝複合偏壓之方式進行單因子實驗分析，探討各種加工參數如工作電壓、進給速度、脈衝週期、衝擊係數以及主軸轉速等對於石英晶圓之各種加工特性影響，加工特性包含入、出口孔徑及出口破片情況。
採用脈衝複合偏壓電化學放電鑽孔加工時，脈衝複合偏壓會使得工具電極上的氣泡不會因為脈衝休止時間而完全消散，這是因為在休止時間時，工作電壓還是可以維持在臨界電壓附近，才不會使氣泡完全消散，並在下一次脈衝開啟時能夠快速生成氣膜，以達到精度要求，實驗結果顯示利用脈衝複合偏壓加工，能有效提升加工能力與材料移除率以及改善出口破裂之情況，並能獲得較佳的擴孔量，在工作電壓42 V、進給速度25 µm/min、脈衝週期30 µs、衝擊係數20 %及主軸轉速100 rpm之下，有最佳孔徑，且能將入、出口孔徑控制在80 ± 8µm之精度內。

摘要(英)

This study used a 55 μm diameter tungsten carbide cylindrical rod as a tool electrode to perform pulse compound bias voltage electrochemical discharge drilling on quartz wafer materials. A series of research on processing characteristics were conducted, hoping to obtain better processing ability and smaller hole expansion. This study performed a single-factor experimental of electrochemical discharge drilling by using pulse compound bias voltage. The effect of the working voltage, feed speed, pulse period, impact coefficient and spindle speed on the diameters of the hole inlet, the diameters of the hole outlet and hole outlet fragments were discussed in the experiment.
When using pulsed compound bias voltage electrochemical discharge drilling, it will prevent the bubbles on the tool electrode from being completely dissipated during the pulse resting period. The reason is that the working voltage can still be maintained near the critical voltage during the rest time, the bubbles will not completely dissipate, and the gas film can be quickly formed when the next pulse is turned on. The phenomenon achieve the accuracy requirements. The experimental results show that the processing capability, material removal rate, outlet fragment can be effectively improved by using pulsed compound bias voltage. It can also obtain a smaller hole expansion. At working voltage 42 V, feed speed 25 µm/min, pulse period 30 µs, impact coefficient 20 % and spindle speed 100 rpm, the best diameters of the hole can be obtained. Both the diameters of the hole inlet and outlet can be controlled within the accuracy of 80 ± 8 µm.

關鍵字(中)

★ 電化學放電鑽孔
★ 脈衝複合偏壓
★ 石英晶圓

關鍵字(英)

★ Electrochemical discharge drilling
★ Pulse compound bias voltage
★ Quartz wafer

論文目次

摘要 I
ABSTRACT II
誌謝 III
目錄 IV
圖目錄 VI
表目錄 IX
第一章緒論 1
1-1 研究背景 1
1-2 研究動機及目的 2
1-3 文獻回顧 4
1-4 論文架構 11
第二章實驗基礎理論 12
2-1 電化學放電加工的基礎理論 12
2-1-1 電化學放電加工之放電火花產生機制 14
2-1-2 電化學放電加工之材料移除機制 17
2-2 放電加工的基礎理論 20
2-2-1 放電加工之材料移除機制 22
第三章實驗設備與材料 25
3-1 實驗方法 25
3-2 基礎實驗相關設備 28
3-3 實驗材料 37
3-4 實驗流程與方法 41
第四章結果與討論 45
4-1 有、無脈衝複合偏壓之加工比較 45
4-2 不同參數下對孔徑之影響 47
4-2-1 工作電壓之影響 47
4-2-2 進給速度之影響 55
4-2-3 脈衝週期之影響 63
4-2-4 衝擊係數之影響 71
4-2-5 主軸轉速之影響 79
第五章結論 86
未來展望 88
參考文獻 89

參考文獻

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指導教授

崔海平(Hai-Ping Tsui)

審核日期

2021-8-18

推文