奈米壓印技術製作全介電幾何相位超穎表面

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姓名

陳家琦(Chia-CHI Chen) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

奈米壓印技術製作全介電幾何相位超穎表面
(Nanoimprint technology for manufacture all-dielectric geometric phase metasurface)

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摘要(中)

本論文設計了一個結合非球面透與炫耀光柵的離軸聚焦超穎透鏡，將奈米壓印技術與超穎表面做結合，利用奈米壓印技術的便利性以及大面積製作等優點，成功的利用PDMS轉印矽基板上超穎表面至玻璃基板上的PI結構層，並探討其轉印過程中的損耗，本論文探討了壓印後超穎表面之奈米壓印片其光學性質，得到超穎表面之奈米壓印片的焦距:4.17 cm 、放大率:0.38 、Strehl ratio為0.34以及線偏振光合圓偏振光所對應到的最大繞射效率分別為0.0145% 和 0.0115%，低效率主要歸因於圖案轉移過程中矩形納米結構的圓化和相對較薄的厚度。我們發現我們所製作出來的樣品有著完整的成像能力以及部份的偏振轉換率。

摘要(英)

In this paper, an off-axis focusing metalens that combines aspheric transparent and dazzling gratings is designed, and the nanoimprint technology is combined with the metasurface. Taking advantage of the convenience of nanoimprint technology and the advantages of large-area fabrication, the successful The use of PDMS to transfer the metasurface on the silicon substrate to the PI structure layer on the glass substrate, and discuss the loss during the transfer process. This paper discusses the optical properties of the nanoimprinted metasurface after imprinting, The focal length: 4.17 cm, magnification: 0.38, Strehl ratio of 0.34, and the maximum diffraction efficiency corresponding to linearly polarized light and circularly polarized light are 0.0145% and 0.0115%, respectively. The low efficiency is mainly attributed to the rounding and relatively thin thickness of the rectangular nanostructures during pattern transfer. We found that the samples we produced had full imaging capability and partial polarization conversion.

關鍵字(中)

★ 幾何相位
★ 超穎透鏡
★ 超穎表面
★ 奈米壓印

關鍵字(英)

★ PB-phase
★ metalens
★ metasurface
★ nanoimprint

論文目次

摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vi
表目錄 ix
第1章緒論 1
1-1 研究背景 1
1-2 研究動機 3
1-3 文獻回顧 3
1-4 研究目標及規劃 10
第2章基本理論 12
2-1 超穎表面 12
2-2 光波的偏振 14
2-3 瓊斯向量 16
2-4 瑞利-索末菲繞射理論(Rayleigh-sommerfeld diffraction) 21
2-5 Pancharatnam−Berry phase 25
第3章製程 28
3-1 超穎透鏡設計 28
3-2 奈米轉印技術 30
3-3 製程 31
3-4 壓印製程 34
3-5 壓印損耗 37
第4章量測架構與數據分析 39
4-1 量測架構及量測方法 39
4-2 聚焦光斑及焦距分析 39
4-3 分析不同偏振態所對應之效率 41
4-4 分析成像及放大率 45
4-5 PI 壓印片量測結果之分析 48
第5章結論與未來展望 50
5-1 結論 50
5-2 未來展望 50
參考文獻 51

參考文獻

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指導教授

王智明(Chih Ming Wang)

審核日期

2022-1-26

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