利用陽極氧化鋁奈米模板法製備可調變之鎳/鈷比例合金奈米線及單根奈米線電性量測技術開發

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姓名

陳佳珊(Chia-Shan Chen) 查詢紙本館藏

畢業系所

化學工程與材料工程學系

論文名稱

利用陽極氧化鋁奈米模板法製備可調變之鎳/鈷比例合金奈米線及單根奈米線電性量測技術開發

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摘要(中)

本研究之研究內容主要分成兩個部份，第一部分為利用陽極氧化鋁奈米模板製備一維純鎳、鈷金屬及其合金奈米線，而第二部分主要探討其單根奈米線之電性。本研究利用兩次陽極氧化處理法成功地製備出大面積奈米孔洞之陽極氧化鋁奈米模板，其孔洞大小分別以草酸及磷酸電解液製備出約48 nm 及187 nm之孔徑。此外，也利用陽極氧化鋁奈米模板進一步結合電化學沉積法，製備出一維純鎳、鈷金屬及其不同組成比例合金（Co:Ni = 2:8、Co:Ni = 1:1、Co:Ni = 8:2）之奈米線。經由穿透式電子顯微鏡（TEM）影像圖及其相對應之電子選區繞射（SAED）鑑定分析可得知所製備出之純鎳奈米線為單晶FCC晶體結構，純鈷奈米線為單晶HCP晶體結構，而三種不同組成成份之鎳/鈷合金奈米線則皆為單晶HCP晶體結構。在單根電性之量測方面，本研究以一種新穎之量測方法成功量測出純鎳、鈷及其合金之單根奈米線電性，其方法不需冗長的前處理、昂貴的成本且可避免金屬奈米線暴露於大氣環境中而造成的氧化，並且經由量測後發現添加不同比例之鎳、鈷金屬及不同直徑大小對於純鎳、鈷金屬及其合金單根奈米線的電阻率皆有所影響。

摘要(英)

This study is divided in two parts. In the first part of this study, we fabricated the pure Ni, Co, and Co/Ni alloy nanowires by anodic aluminum oxide (AAO) template method. In the second part of this study, we explore the electrical properties of single pure Ni, Co, and Co/Ni alloy nanowires. In this work, the two-step anodizing approach is successfully used to fabricate large area nanoporous AAO template. The AAO template with pore diameters of 48 nm (oxalic acid) and 187 nm (phosphoric acid), respectively. In addition, we have demonstrated that one dimensional pure Ni, Co, and Co/Ni alloy nanowires with different concentration ratios of Co to Ni (Co:Ni=2:8, Co:Ni=1:1, Co:Ni=8:2) nanowires were successfully produced by using the AAO template combined with the electrochemical deposition technique. From TEM and SAED analysis indicated that the pure Ni, Co and Co/Ni alloy nanowires were single crystalline with FCC, HCP and HCP structures, respectively. To measure the electrical properties of single nanowire, a variety of measurement techniques have been developed. However, the low processing speed, high-cost, and oxidation make them challenging to use. In this study, we propose a novel approach to measure the electrical properties of single nanowire, it is found that the addition of Co to Ni and different diameter sizes could strongly affect the resistivity of pure Ni, Co and Co/Ni alloy nanowires.

關鍵字(中)

★ 陽極氧化鋁奈米模板
★ 單根奈米線電性量測
★ 鎳/鈷合金奈米線

關鍵字(英)

論文目次

第一章前言及文獻回顧 1
1-1前言 1
1-2陽極氧化鋁奈米模板 2
1-2-1陽極氧化鋁奈米模板之發展背景 2
1-2-2 陽極氧化鋁奈米模板成長機制 3
1-2-3 陽極氧化鋁奈米模板成長控制變因 5
1-2-4 陽極氧化鋁奈米模板規則化孔洞製程 6
1-3 一維金屬奈米結構 7
1-3-1一維金屬奈米線之製備 7
1-3-2 一維金屬奈米線之應用 9
1-4 單根金屬奈米線之電性量測 10
1-5 研究動機及目標 11
第二章實驗步驟及實驗設備 13
2-1 陽極氧化鋁奈米模板之製程 13
2-1-1 高純度鋁片之前處理 13
2-1-2 高純度鋁片之表面平坦化處理 13
2-1-3 以草酸製備陽極氧化鋁奈米模板 14
2-1-4 以磷酸製備陽極氧化鋁奈米模板 15
2-2 電化學沉積法製備一維純鎳、鈷及其合金奈米線 16
2-3 電性量測之試片製備 17
2-4 實驗設備 17
2-4-1 陽極氧化鋁奈米模板製備系統 17
2-4-2 電化學沉積系統 17
2-4-3 電性量測系統 17
2-5 儀器分析實驗 18
2-5-1 掃描式電子顯微鏡 18
2-5-2 穿透式電子顯微鏡 18
2-5-3 高解析穿透式電子顯微鏡 19
第三章結果與討論 20
3-1 高純度鋁片之電解拋光 20
3-2 陽極氧化鋁奈米模板之製備 21
3-2-1 利用草酸電解液製備陽極氧化鋁奈米模板 21
3-2-2 利用磷酸電解液製備陽極氧化鋁奈米模板 22
3-2-3 不同時間下陽極氧化鋁奈米模板之生成速率 24
3-2-4 陽極氧化鋁奈米模板阻障層開孔之製程 24
3-3 陽極氧化鋁奈米模板結合電化學沉積法製備一維純鎳、鈷金屬及其合金奈米線 26
3-3-1 純鎳金屬奈米線之結構分析 27
3-3-2 純鈷金屬奈米線之結構分析 27
3-3-3 鎳/鈷合金金屬奈米線之結構分析 28
3-4一維純鎳、鈷金屬及其合金之單根奈米線電性量測分析 29
3-4-1 以大孔徑模板製備之純鎳、鈷金屬及其合金之單根奈米線電性分析30
3-4-2 以小孔徑模板製備之純鎳、鈷金屬及其合金之單根奈米線電性分析32
第四章結論與未來展望 34
4-1 結論 34
4-2 未來與展望 34
參考文獻 36
表目錄 43
圖目錄 44

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指導教授

鄭紹良

審核日期

2022-9-29

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