適用於覆晶封裝、厚度薄型化矽基光電二極體之一維光柵: 設計與分析

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姓名

賴虢樺(Kuo-Hua Lai) 查詢紙本館藏

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光電科學與工程學系

論文名稱

適用於覆晶封裝、厚度薄型化矽基光電二極體之一維光柵: 設計與分析
(Design and Analysis of 1D Gratings for Flip-Chipped, Thickness-Reduced Silicon Photodiode in the Near-Infrared Regime)

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摘要(中)

於大多p - i - n 光電二極體大多厚度為150 至200 μm，本論文討論了在晶圓背面以一維光柵結構提升背收光矽基光電二極體之主動層吸收率，此背收光之光柵結構可進一步減薄其晶圓厚度同時實現覆晶(flip-chip) 封裝進而降低產品厚度達45%

摘要(英)

This paper demonstrates a backside illuminated photodiode with 45% package thickness reduction and maintains the same level or higher power absorbance in the active area by adding a dielectric grating structure on the backside of the silicon base p - i - n photodiode. Compare the front-illuminated silicon p - i - n photodiode with general thickness in 150 μm to 200 μm. This paper design a dielectric grating on the back side of the silicon photodiode and further reduce the silicon thickness to 75 μm, which is the mature capability for the wafer thinning process. As a back-illuminated photodiode, it can apply to the flip-chipped package structure and further reduce the total package thickness from 0.55 mm to 0.305 mm with 45% thickness reduction.

關鍵字(中)

★ 覆晶封裝
★ 一維光柵
★ 矽基光電二極體

關鍵字(英)

★ Flip-chipped
★ 1D Grating
★ Photodiode

論文目次

一、緒論.................1
二、結構及模擬參數設定....10
三、理論背景.............16
四、數值模擬結果.........27
五、結論.................49

參考文獻

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指導教授

張殷榮(Yin-Jung Chang)

審核日期

2022-9-26

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