機械手臂在高速波前量測的應用

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姓名

陳愷威(Kai-Wei Chen) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

機械手臂在高速波前量測的應用
(Application of mechanical arm in high-speed wavefront measurement)

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至系統瀏覽論文 (2025-9-1以後開放)

摘要(中)

現今對於小型鏡片的需求越來越多且越來越廣，但對於檢測小型鏡片之偏心的設備卻無一能做到高速且準確地量測。本實驗室先前開發出一種能夠高速且高通量的自動化波前檢測設備儀器來解決需要大量檢測小型鏡片之偏心的需求。相較於市面上的產品，該儀器可以在10秒內檢測完一顆鏡片，而且有的偏心量測重複性。因為該儀器是非接觸式量測，檢測完的鏡片可以實裝在光學元件上直接使用，滿足製造方需大量且快速檢測並且現量現用的需求。
但對應到此儀器設備高速且高精度的檢測，如何將鏡片快速且穩定地放置在量測位置上，除了取放設備本身的速度與精度必須要達到檢測要求，定位座標的部分也成了很重要的前置作業。
本實驗針對量測設備上鏡片定位的部分，有別於以往用肉眼費時且精度低的定位，我們改採用高精度的探頭來讓負責取放鏡片的機械手臂有精確並且可自動定位的座標，並且透過此定位方式也確實改善鏡片偶爾會放置在錯的位置的情況，來達到我們高速且高精度的量測標準。

摘要(英)

Today, the demand for small lenses continues to increase and expand, but no small lens eccentricity detection equipment can achieve high-speed and accurate measurement. A large number of automated wavefront detection equipment and instruments are required to solve a large number of detection requirements for small lens eccentricity. The instrument can detect a lens in 10 seconds, and measurement repeatability about 0.02-0.05 um, because of the non-contact measurement, the detected lens can be directly installed on the optical element, meeting the needs of a large number of rapid inspections.
However, in order to cope with the high-speed and high-precision detection of this kind of equipment, in addition to the speed and accuracy of the pick-and-place equipment itself, which must meet the detection requirements, the positioning coordinates also become very important upfront work. Different from the time-consuming and low-precision positioning of the naked eye in the past, we switched to a high-precision probe, so that the robotic arm responsible for picking and placing the lens has accurate and automated positioning coordinates. This positioning method does improve the occasional placement of the lens in the wrong place.

關鍵字(中)

★ 機械手臂
★ 波前量測
★ 高動態範圍波前檢測器

關鍵字(英)

★ Mechanical Arm
★ Wavefront Measurement
★ HDR Shack Hartmann WFS

論文目次

摘要 II
ABSTRACT III
致謝 IV
目錄 V
圖目錄 VIII
表目錄 XII
一、緒論 1
1-1 研究背景 1
1-2 文獻回顧 2
1-3 研究動機 5
二、研究內容及方法 7
2-1 光學像差理論 7
2-1-1 幾何光學成像公式 7
2-1-2 單色像差介紹 8
2-1-3 Seidel 多項式 9
2-1-4 Zernike 多項式 12
2-2 SHACK-HARTMANN WAVEFRONT SENSOR 15
2-2-1 量測原理介紹 15
2-2-2 光點指派計算 16
2-2-3 光點質心運算法 18
2-2-4 高動態範圍Shack-Hartmann Wavefront Sensor 19
2-2-5 波前重建 21
2-3 單一鏡片量測方法 22
2-3-1 穿透式波前量測 22
三、實驗架構及方法 28
3-1 HDR-SHWFS偏心量測系統架構 28
3-1-1 機械手臂 29
3-2 機械手臂精確定位 30
3-2-1 SLAVTEC高精度量測探頭 31
3-2-2 驗證探頭補償數值及方向 35
3-2-3 Renishaw 高精度量測探頭 38
3-2-4 使用探頭定位座標 46
3-2-5 將定位座標回推至吸嘴座標 50
3-3 利用像差來反映鏡片的放置狀況 51
四、實驗分析 53
4-1 鏡片重複取放量測實驗 53
4-1-1 厚彎月型非球面鏡片重複量測 54
4-1-2 平凸非球面鏡片重複量測 55
4-1-3 M型非球面鏡片重複量測 56
4-2 定位偏差最大值量化實驗 57
4-2-1 起始點位偏差值之量測結果 58
4-2-2 起始點位偏差值之量測結果 59
五、結論 61
六、參考文獻 62

參考文獻

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指導教授

梁肇文(Chao-Wen Liang)

審核日期

2022-9-27

推文