雙源順序熱蒸鍍全無機混合鹵化物鈣鈦礦藍色發光二極體之研究

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曲芸萱(YUN-HSUAN CHU) 查詢紙本館藏

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機械工程學系

論文名稱

雙源順序熱蒸鍍全無機混合鹵化物鈣鈦礦藍色發光二極體之研究
(The Study of Dual-source Sequential Vacuum Deposition of Inorganic Mixed Halide Perovskite for Blue Light Emitting Diode)

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摘要(中)

全無機金屬鹵化物鈣鈦礦材料因其可以透過調整鹵化物成分來調整能帶，進而擁有
從深藍光氯化物、綠光溴化物到近紅外光碘化物的不同的發光顏色，所以被廣泛的使用
在光電領域中。在 LED 領域中，由高純度的三原色光打造廣色域，其中藍光可以藉由
混和 Cl 和 Br 的鹵化物鈣鈦礦實現，但效率及穩定性都大幅落後綠光及紅光 LED，而目
前學術上關於蒸鍍製程的研究很少，主流採用溶液法製程製備藍光 LED，並時常加入部
份有機離子團(如 MA+、FA+和 PEA+等)來提升性能，並非全無機鈣鈦礦材料。
本研究主要是利用雙源順序蒸鍍法以固定厚度比例分別蒸鍍 CsPbCl3 和 CsPbBr3 材
料，取代了利用單源熱蒸鍍製程蒸鍍 CsPbBr3-xClx材料，並利用 XRD、UV-vis 及 SEM
展示了雙源順序蒸鍍的優勢，再進一步搭配製程後退火處理製備出具高品質的
CsPbBr3-xClx發光薄膜，其 PL 波長為 463.1nm，FWHM 為 16.2nm。
將薄膜應用在 LED 中作為主動層，並經過 UPS 量測分析後確認其能階位置，印證
元件以 ITO/ALD-ZnO/CsPbBr3-xClx/碳膠的結構符合能階的匹配。為了使元件亮度等性能
得到改善，本研究主要針對主動層的熱處理時間、平整性、結晶性、孔洞缺陷和均勻性
進行一系列的改良，最後成功以主動層參數為 CsPbBr3-CsPbCl3-CsPbBr3 的三明治結構，
在電壓為 3.9V 以及電流密度為 691mA/cm2 時，得到最大亮度 289nits，在 CIE 1931 色
域圖中座標為(0.1363,0.0958)，對應發光波長為 470.4nm。

摘要(英)

All-inorganic metal halide perovskite materials are widely used in the field of
optoelectronics, because they can adjust the energy band by adjusting the halide composition,
and then have different emission colors from deep blue chloride, green bromide to near-infrared
iodide. In the field of LED research, a wide color gamut is created from high-purity three
primary colors. Among them, blue light emitting layer can be obtained by mixed halide
perovskite with Cl and Br, but the efficiency and stability are far behind green and red one. At
present, little research about blue and green LED has been conducted in evaporation process.
Most of the research is conducted in solution process to prepare blue LEDs, and often use partial
organic cation groups(such as MA+
, FA+
and PEA+
) to improve device performance, which isn’t
all-inorganic metal halide perovskite material.
In this study, CsPbCl3 and CsPbBr3 powder is evaporated respectively with a fixed
thickness ratio by the dual-source sequential vacuum deposition, instead of the single-source
vacuum deposition to evaporate the CsPbBr3-xClx powder, and XRD, UV-vis and SEM are used
to demonstrate the advantages of dual-source sequential vacuum deposition. The obtained film
is further annealed after the deposition process to prepare a high-quality CsPbBr3-xClx
lumenescent film with PL wavelength of 463.1 nm and FWHM of 16.2 nm.
The CsPbBr3-xClx thin film is applied in the LED as the active layer, and UPS measurement
and analysis confirm the energy level position and energy level matching of the LED with the
structure of ITO /ALD-ZnO /CsPbBr3-xClx /C. In this study, annealing process, flatness,
crystallinity, hole defects and uniformity of the active layer have been improved to enhance
LED performance. Finally, the active layer of CsPbBr3-CsPbCl3-CsPbBr3 sandwich structure
obtain the maximum luminance of 289nits, CIE coordinate of (0.1363, 0.0958) and the
corresponding emission wavelength of 470.4nm at 3.9V and 691mA/cm2
.

關鍵字(中)

★ 鈣鈦礦
★ 雙源順序熱蒸鍍
★ 全無機混合鹵化物
★ 藍色發光二極體

關鍵字(英)

★ Perovskite
★ Dual-source Sequential Vacuum Deposition
★ Inorganic Mixed Halide
★ Blue Light Emitting Diode

論文目次

目錄
摘要.......................................................................................................................................................... i
Abstract ................................................................................................................................................... ii
誌謝........................................................................................................................................................ iii
目錄........................................................................................................................................................ iv
圖目錄.................................................................................................................................................... vi
表目錄.................................................................................................................................................... xi
第 1 章緒論........................................................................................................................................ vi
1-1 前言 ............................................................................................................................................. 1
1-2 鈣鈦礦材料介紹 ......................................................................................................................... 2
1-3 鈣鈦礦薄膜製造與應用.............................................................................................................. 3
1-3-1 鈣鈦礦薄膜熱蒸鍍製程 ...................................................................................................... 5
1-4 鈣鈦礦的光致發光.................................................................................................................... 10
1-5 鈣鈦礦 LED 發展...................................................................................................................... 14
1-5-1 主動層空位缺陷改善 ........................................................................................................ 17
1-5-2 主動層表面形貌改善 ........................................................................................................ 20
1-5-3 電子及電洞傳輸層改善 .................................................................................................... 22
1-6 研究動機 ................................................................................................................................... 28
第 2 章實驗方法............................................................................................................................... 29
2-1 實驗藥品及儀器 ....................................................................................................................... 29
2-1-1 實驗藥品............................................................................................................................ 29
2-1-2 實驗儀器............................................................................................................................ 29
2-2 實驗步驟 ................................................................................................................................... 31
2-2-1 基板清潔............................................................................................................................ 31
2-2-2 氧化鋅(ZnO)沉積.............................................................................................................. 31
2-2-3 雙源熱蒸鍍製程................................................................................................................ 31
2-2-4 製程後熱退火.................................................................................................................... 32
2-2-5 碳膠刮塗............................................................................................................................ 32
v
2-2-6 LED 元件量測 .................................................................................................................... 32
2-3 實驗儀器分析介紹.................................................................................................................... 33
2-3-1 X-射線繞射儀(X-ray Diffractometer, XRD)...................................................................... 33
2-3-2 紫外線∕可見光分光光譜儀(Ultraviolet -visible spectroscopy, UV-Vis)....................... 33
2-3-3 掃描式電子顯微鏡(Scanning Electron Microscope, SEM) .............................................. 33
2-3-4 紫外光電子能譜儀(Ultraviolet Photoelectron Spectroscopy, UPS) ................................. 33
2-3-5 光諧儀及積分球(Spectrometer & Integrating Sphere)...................................................... 33
2-3-6 輝度計(Luminance Colorimeter) ....................................................................................... 34
第 3 章結果與討論........................................................................................................................... 35
3-1 熱蒸鍍 CsPbBr3-xClx薄膜......................................................................................................... 35
3-1-1 薄膜成分組成.................................................................................................................... 35
3-1-2 熱蒸鍍方法比較................................................................................................................ 35
3-2 CsPbBr3-xClx薄膜分析............................................................................................................... 38
3-2-1 CsPbBr3-xClx薄膜熱處理溫度............................................................................................ 38
3-3 UPS 分析.................................................................................................................................... 40
3-4 藍光 LED 元件.......................................................................................................................... 42
3-4-1 主動層成分改善................................................................................................................ 42
3-4-2 主動層熱處理時間............................................................................................................ 44
3-4-3 主動層平整性改善............................................................................................................ 47
3-4-4 主動層結晶性及孔洞改善 ................................................................................................ 51
3-4-5 主動層結晶均勻度改善 .................................................................................................... 53
第 4 章結論....................................................................................................................................... 58
參考文獻............................................................................................................................................... 59
附錄....................................................................................................................................................... 64

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文,民國 110 年

指導教授

詹佳樺(Chia-Hua Chan)

審核日期

2022-8-25

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