層狀金屬硫化物設計之異質結構應用於壓電奈米發電機

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姓名

李承澤(Chen-Tse Lee) 查詢紙本館藏

畢業系所

生醫科學與工程學系

論文名稱

層狀金屬硫化物設計之異質結構應用於壓電奈米發電機
(Heterostructure design of Layered Metal Dichalcogenides for Piezoelectric Nanogenerator Applications)

相關論文

★ 開發以層狀金屬硫族化物之奈米複合材料於多功能摩擦奈米發電機設計

★ 開發垂直型無鉛鈣鈦礦結構應用於壓電元件設計

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至系統瀏覽論文 (2028-10-1以後開放)

摘要(中)

以層狀金屬硫化物 (Layered Metal Dichalcogenides, LMDCs) 為基底之壓電領域應用已受到廣泛矚目，特別在於微型化能源裝置以及穿戴式感測系統。然而，輸出不足的問題仍是其一大挑戰。本研究中，我們嘗試以化學氣相沉積法製備異質結構，並探討此結構之本質壓電特性以及其壓電提升機制。我們也進一步將其導入於壓電奈米發電機 (piezoelectric nanogenerator, PENG) 元件與自供電應變感測器設計。最重要的是，我們也成功將此異質結構之奈米發電機元件，應用於多元人體動作監測，展示其作為下一世代高靈敏穿戴式生醫感測系統之潛力。

摘要(英)

Layered Metal Dichalcogenides (LMDCs) has attracted widespread attention in
the field of piezoelectric system, especially for miniaturized energy devices and
wearable sensing systems. However, the issue of insufficient output still remains a
critical challenge. In this study, we developed a heterostructures of by using (Chemical
Vapor Deposition, CVD), and investigated their intrinsic piezoelectricity and related mechanism to the enhancement. Moreover, we further integrated them into a piezoelectric nanogenerator (PENG) device and self-powered strain sensors. Most importantly, we successfully applied the PENG to monitor various human movements, demonstrating its potential as the next generation highly sensitive wearable biomedical
sensing systems.

關鍵字(中)

★ 化學氣相沉積
★ 壓電奈米發電機

關鍵字(英)

論文目次

摘要................................................................................................................................ I
Abstract.........................................................................................................................II
目錄..............................................................................................................................III
圖目錄...........................................................................................................................V
表目錄.......................................................................................................................VIII
第一章緒論..................................................................................................................1
1-1 二維層狀材料........................................................................................................1
1-2 二維層狀材料之異質結構....................................................................................2
1-3 壓電奈米發電機....................................................................................................3
1-4 研究動機................................................................................................................4
第二章文獻回顧..........................................................................................................7
2-1 二維材料垂直異質結構之製備技術....................................................................7
2-1-1 機械剝離法................................................................................................7
2-1-2 化學氣相沉積法........................................................................................8
2-1-3 原子層沉積法............................................................................................9
2-2 二維材料轉移方式..............................................................................................11
2-2-1 乾式轉移法 ( Dry transfer )............................................................11
2-2-2 濕式轉移法 (Wet transfer)................................................................12
2-3 層狀金屬硫化物之壓電性..................................................................................13
2-4 層狀金屬硫化物製備之壓電奈米發電機..........................................................15
2-5 異質結構提升壓電性之理論..............................................................................16
2-6 超靈敏生醫感測器應用......................................................................................17
第三章材料合成方法與元件製程............................................................................18
3-1 儀器使用..............................................................................................................18
IV
3-2 材料鑑定之儀器..................................................................................................20
3-2-1 光學金相顯微鏡......................................................................................20
3-2-2 拉曼光譜儀..............................................................................................21
3-2-3 光致發光光譜..........................................................................................22
3-2-4 X 光繞射儀..............................................................................................23
3-2-5 穿透式電子顯微鏡..................................................................................24
3-2-6 X 射線光電子能譜以及紫外光電子能譜............................................25
3-2-7 壓電力顯微鏡..........................................................................................27
3-3 實驗方法與元件製程..........................................................................................29
3-3-1 化學氣相沉積兩步驟合成異質結構......................................................29
3-3-2 聚合物濕式轉移法..................................................................................33
3-3-3 黃光微影與蒸鍍金屬電極......................................................................34
3-3-4 元件封裝..................................................................................................35
第四章結果與討論....................................................................................................36
4-1 異質結構之鑑定..................................................................................................36
4-1-1 異質結構之光學影像..............................................................................36
4-1-2 異質結構拉曼光譜與厚度之鑑定..........................................................37
4-1-3 異質結構之晶形鑑定..............................................................................38
4-1-4 異質結構之元素組成分析......................................................................40
4-1-5 異質結構之能帶分析..............................................................................40
4-1-6 異質結構之壓電響應測試......................................................................42
4-2 壓電奈米發電機之輸出效能..............................................................................45
4-3 壓電奈米發電機於生醫感測之應用................................................................47
第五章結論與未來展望............................................................................................49
參考文獻......................................................................................................................50

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指導教授

楊伯康(Po-Kang Yang)

審核日期

2023-10-19

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