半導體晶圓廠的經濟性產能優化： 電腦模擬方法的應用

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姓名

王紫妘(Zih-Yun Wang) 查詢紙本館藏

畢業系所

企業管理學系

論文名稱

半導體晶圓廠的經濟性產能優化：電腦模擬方法的應用
(Economic Capacity Optimization for Semiconductors Manufacturing Fabs: An Application of Computer Simulation Method)

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至系統瀏覽論文 (2026-6-29以後開放)

摘要(中)

半導體產業其資本支出都較為龐大，且電子產業其產品生命周期較短的緣故，半導體製造商在面對龐大的投資金額以及身處高度競爭的環境之中，不僅要滿足顧客的要求，還必須能夠在短期之內進入市場才能在產品市場中具有競爭力，為此需要透過正確的機台組合達到快速供貨的能力，即提升資本的使用效率來增強企業的競爭力，因此萌生了研究如何讓晶圓廠達到經濟效益最優化的產出模式。
本研究之研究模型為將半導體晶圓廠預設十個加工工作區，假設當半導體市場需求資訊給定的情況下，根據起始解得出的機台數量，應用電腦模擬進行廠區模擬產生出相關的生產績效資料，再利用迴歸分析找出晶圓廠區中需要進行優化改善的工作區域，並運用模擬退火演算法有效率地做機台數量調整，以利在最短的時間內使生產及資本的效益最佳化。在本研究中之起始解及驗證解中可以發現，生產績效部分，產出率增加了0.18%、在製品數量減少0.13%、製造時間也減少了0.30%，證實本研究方法找出之關鍵影響工作區對於廠區之整體作用是有顯著影響力的。

摘要(英)

The semiconductor industry requires significant capital expenditures, and due to the short product lifecycle in the electronics industry, semiconductor manufacturers face immense investment costs and a highly competitive environment. They not only need to meet customer demands but also must enter the market quickly to remain competitive in the product market. To achieve this, they need the capability to rapidly supply products through the right combination of equipment, thus improving the efficiency of capital utilization and enhancing the competitiveness of the company. As a result, there is a need to study how to optimize the production mode of wafer fabs to achieve the best economic benefits.
The research model in this study assumes ten processing zones in a semiconductor wafer fab. Under the given semiconductor market demand information, the initial solution determines the number of equipment required. Computer simulations are then applied to generate relevant production performance data for the fab. Regression analysis is used to identify the areas in the wafer fab that require optimization and improvement, and an efficient simulated annealing algorithm is employed to adjust the number of equipment, aiming to optimize production and capital efficiency in the shortest possible time. Through the initial and validation solutions in this study, it was found that in terms of production performance, the output rate increased by 0.18%, the work-in-process quantity decreased by 0.13%, and the manufacturing time decreased by 0.30%. This confirms that the key affected areas identified by the research methodology have a significant impact on the overall operation of the wafer fab.

關鍵字(中)

★ 半導體製程
★ 產能規劃
★ 電腦模擬
★ 迴歸分析
★ 模擬退火演算法

關鍵字(英)

★ semiconductor manufacturing
★ capacity planning
★ computer simulation
★ regression analysis
★ simulated annealing algorithm

論文目次

摘要 I
ABSTRACT II
致謝 III
目錄 IV
圖目錄 VI
表目錄 VII
第一章緒論 1
1.1研究背景與動機 1
1.2研究目的 2
第二章半導體製程及其產業特性 3
2.1 半導體製程簡介 3
2.1.1半導體製程 3
2.1.2晶圓廠製造流程 3
2.2半導體產業特性及管理問題 6
2.2.1半導體產業特性 6
2.2.2半導體生產系統的特性 9
2.2.4半導體產業管理問題分析 10
第三章文獻回顧 12
3.1半導體工廠產能規劃模式介紹 12
3.1.1數學規劃模式 12
3.1.2等候網路模式 13
3.1.3模擬模式 14
3.1.4迴歸分析 15
3.2啟發式演算法 16
3.2.1爬山法搜尋 17
3.2.2模擬退火演算法 17
3.3綜合論述 19
第四章方法發展 20
4.1問題描述與定義 20
4.1.1 半導體廠的產能配置 20
4.1.2半導體廠的經濟考量 21
4.1.3 模型假設 22
4.2機台起始解的建構 23
4.3判斷關鍵工作區域 25
4.4機台數量調整方法-模擬退火演算法 26
4.5關鍵工作區域判定與最適機台配置決策之架構 30
第五章實例驗證 31
5.1模擬環境設定 31
5.2最適產能機台配置 34
5.2.1各工作區機台數量之起始解 34
5.2.2迴歸分析-關鍵機台選擇 35
5.2.3模擬退火演算法 39
5.3實驗數值分析與結果 43
第六章結論 45
6.1結論 45
6.2研究限制與後續研究 46
參考文獻 47
附錄 51

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指導教授

呂俊德(Jun-Der Leu)

審核日期

2023-7-10

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