以微銑削製程進行金屬微流道及微結構製造研究

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楊勝光(Shen-guang,Yang) 查詢紙本館藏

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論文名稱

以微銑削製程進行金屬微流道及微結構製造研究
(Research on the fabrication of metal microchannels and microstructures using micro-milling process.)

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至系統瀏覽論文 (2028-11-21以後開放)

摘要(中)

本次論文研究，可分為兩部份，分別以銅材料，做為製造高深寬比微流道成品材料。另外使用銅、鋁6061材料，做為製造微結構成品材料。搭配使用電腦數控銑床(Computer numerical control milling machine , CNC milling machine)進行微銑削(Micro-milling)，利用電腦數控銑床優勢，例如:微流道模具快速建模、高深寬比微流道、良好微流道尺寸控制和即時進行少量化生產等優勢，微觀銑削製程時與宏觀微銑削製程，有著不同銑削狀態，被稱為尺寸效應(Size effect)，本次研究製造，著重在高深寬比微流道，然而使用加長型端銑刀(Extra long end-mill)、加長型球形端銑刀(Extra long ball-end-mill)進行銑削時，因為參數設定不同，例如：主軸轉速(Spindle speed,N)、進給速率(Feed rate,V_f)、每刀切深量(Axial cutting depth,a_P)、每齒進給率(Feed per tooth,f_z)，皆具有不同犁切效應(Ploughing effect)影響，對於微銑削後，表面粗糙度(Surface roughness,R_z)、毛邊尺寸(Burr size)，具有不同影響成品精準度，且使用其他方式，並不容易移除毛邊，故將對於加長型端銑刀，使用銑削參數進行研究。此外，使用加長型球形端銑刀具，產生自然扇形高度(Scallop height)，影響微銑削後表面粗糙度，且搭配十字型刀具銑削路徑，在材料表面製造出金字塔微結構(Microstructure)，並研究此金字塔微結構尺寸變化。

摘要(英)

The present research can be divided into two parts, each focusing on the utilization of copper materials for the fabrication of high aspect ratio microchannels as well as the use of copper and aluminum 6061 materials for the production of microstructures. Micro-milling processes are conducted using a computer numerical control milling machine (CNC milling machine). Leveraging the advantages of CNC milling machines, such as rapid modeling of microchannel molds, the creation of high aspect ratio microchannels, precise control of microchannel dimensions, and real-time small-scale production capabilities, the micro-milling process exhibits distinct milling conditions when compared to macro-milling processes. This phenomenon is known as the size effect. In this study, the emphasis is placed on high aspect ratio microchannels.
However, when utilizing extended end mills and extended ball-end mills for milling, variations in milling parameters, such as spindle speed(N), feed rate(V_f), axial cutting depth per pass (a_P), and feed per tooth (f_z) result in different ploughing effects. Consequently, after micro-milling, the surface roughness (R_z) and burr size exhibit differing impacts on the precision of the final product. Additionally, alternative methods are not easily effective in removing burrs. Therefore, this research investigates the use of extended end mills with different milling parameters.
Furthermore, the use of extended ball-end mills produces a natural scallop height, which affects the surface roughness after micro-milling. When combined with a cross-shaped toolpath, it creates pyramid microstructures on the material′s surface. The variation in the dimensions of these pyramid microstructures is also studied.

關鍵字(中)

★ 微銑削
★ 加長型端銑刀
★ 加長型球形端銑刀
★ 微流道
★ 微結構
★ 毛邊
★ 表面粗糙
★ 犁切效應

關鍵字(英)

★ Micro-milling
★ Extra long end-mill
★ Extra long ball-end-mill
★ Microchannel
★ Microstructures
★ Burrs size
★ Surface roughness
★ Ploughing effect

論文目次

目錄
摘要................................................................i
致謝...............................................................iii
目錄...............................................................iv
圖目錄..............................................................v
表目錄............................................................viii
第一部分微流道製造.................................................1
第一章緒論.........................................................1
1.1前言............................................................1
1.2製造金屬微流道現況..............................................2
1.2.1蝕刻製程......................................................2
1.2.2放電加工......................................................2
1.2.3雷射加工......................................................3
1.2.4微銑削製程....................................................5
1.3研究動機.......................................................10
第二章實驗設備及設計方法..........................................11
2.1微流道實驗設備及方法...........................................11
2.1.1量測微流道毛邊寬度實驗設備及方法.............................11
2.1.2量測微流道表面粗糙度實驗設備及方法...........................13
第三章實驗結果與討論..............................................15
3.1微流道製造.....................................................16
3.1.1每刀銑削深度影響高深寬比微流道精度...........................16
3.1.2每齒進給量及進給速率影響高深寬比薄壁微流道精度...............22
3.1.3利用端銑刀製造低表面粗糙度高深寬比微流道.....................30
3.1.4利用球形端銑刀製造可控制表面粗糙度曲面微流道.................33
3.2微流道製造成品.................................................42
第四章結論........................................................43
第五章未來展望....................................................44
第二部分微結構製造................................................45
第一章緒論........................................................45
1.1前言...........................................................45
1.2製造金屬微結構現況.............................................45
1.2.1蝕刻製程.....................................................45
1.2.2放電加工製程.................................................47
1.2.3雷射加工製程.................................................48
1.2.4微銑削製程...................................................49
1.3研究動機.......................................................51
第二章實驗材料設備與方法..........................................51
2.1微結構實驗設備及方法...........................................51
2.2微結構量測接觸角實驗使用設備及設計方法.........................54
第三章結果與討論..................................................55
3.1金字塔微結構製造...............................................55
3.2金字塔微結構產生疏水性效果.....................................62
第四章結論........................................................65
第五章未來展望....................................................65
參考文獻...........................................................66
圖目錄
Figure (1)Using etching fabrication metal microchannel. ......................2
Figure (2)Using electric discharge machining fabrication metal microchannel. ....3
Figure (3)Fabrication of microchannels using laser machining. .................4
Figure (4)Three types of material removal mechanisms in micro-milling.[30] .....5
Figure (5)Milling schematic diagram.[36] .................................6
Figure (6)Schematic diagram of burr formation.[38] .........................6
Figure (7)Review of parameters and burr used in micro-milling. ................8
Figure (8)Micro-milling process for manufacturing metal microchannels. ........9
Figure (9)Using CNC five-axis processing machine (Hartford 5A-25R) .........11
Figure (10)Measuring edge using equipment.(Nikon Optical Microscope) .......12
Figure (11)Surface Roughness Measurement Equipment (Bruker Dektak XT) ....13
Figure (12)Manufacturing microchannel and microchannel mold process. .......15
Figure (13)Compare extra length and ordinary 0.8mm end-mill. ...............16
Figure (14)Milling parameter stability. (a) Unstable parameters. (b)stable parameters. ........................................................17
Figure (15)Micro-milling schematic diagram.(adapt[59]) ....................17
Figure (16)Extend length end-mill with 0.8mm diameter (titanium silicon coating) cutter edge radius diagram. ............................................18
Figure (17)Diagram illustrating the relationship between each pass milling depth(a_p) and minimum chip thickness(h_min). .....................................18
Figure (18)Single-pass and multiple-pass milling schematic diagram. ..........19
Figure (19)Schematic diagram for calculating Average burr width at the microchannel. ......................................................19
Figure (20)Use a extra length 0.8mm diameter end-mill (titanium silicon coating). ...........................................................21
Figure (21)Schematic diagram of the influence of material grain position on micro-milling process. (adapt[62]) ...........................................22
Figure (22)Compare extra length and ordinary 0.4、0.3mm end-mill. ..........23
Figure (23)Extra length end-mill tool radius (r_e) diagram. ...................23
Figure (24)Conditions with aspect ratio 13:1 microchannel wall thickness of 0.15mm, depth of 2mm (upper image), and 0.10mm (lower image). ...................23
Figure (25)Diagram of per tooth feed rate (f_z). ............................24
Figure (26)f_z to r_e ratio (Single pass milling). ............................26
Figure (27)Diagram of per tooth feed rate. (a)Smaller f_z. (b)Bigger f_z..........26
Figure (28)Using extra length a 0.3mm diameter end-mill (Titanium Silicon Coating). ..........................................................28
Figure (29)Using extra length a 0.4mm diameter end-mill (Titanium Silicon Coating). ..........................................................29
Figure (30)Schematic diagram for calculating surface roughness. ..............30
Figure (31)Tool marks on the bottom of microchannels after milling at different spindle speeds. ......................................................31
Figure (32)Surface roughness experiment with extra length 0.8mm diameter end-mill (Titanium Silicon Coating). ............................................33
Figure (33)Schematic Diagram of scallop height generated using a ball-end-mill.(adapt[66]) .....................................................34
Figure (34)Difference between theoretical and actual values of scallop height for extended ball-end-mill. ...............................................35
Figure (35)Extra length 0.8、0.7、0.6mm ball-end-mill (Titanium Silicon Coating) cutter face image and tool edge radius diagram. ............................36
Figure (36)Schematic diagram of ball-end-mill milling in the shear area and ploughing effect area.(adapt[70, 71]) ....................................36
Figure (37)Experimental diagram of surface roughness using ball-end-mill with spacing between tool paths. ............................................37
Figure (38)Schematic diagram of the influence of ball-end-mill path spacing on scallop height and surface roughness. ....................................37
Figure (39)Surface roughness control experiment with extra length 0.8mm diameter ball-end-mill. .......................................................39
Figure (40)Surface roughness control experiment with extra lenght 0.7mm diameter ball-end-mill. .......................................................40
Figure (41)Surface roughness control experiment with extra length 0.6mm diameter ball-end-mill. .......................................................41
Figure (42)Microchannel heat sink. .....................................42
Figure (43)Microchannel mold. ........................................43
Figure (44)Etching process to create microstructure. ........................46
Figure (45)The picture of workpiece deformation and recast layer. .............47
Figure (46)Manufacturing microstructures using laser processing. .............48
Figure (47)The the 3D chip geometry of a micro ball-end mill feed in the horizontal direction when the angle is set to zero. ...................................49
Figure (48)Area of cut in ball-end milling considering the shearing and ploughing areas. .............................................................50
Figure (49)Fabrication of metal microstructures with micro-milling process. .....50
Figure (50)Using CNC five-axis processing machine (Hartford 5A-25R) ........52
Figure (51)Extra-length ball-end mill with diameters of 0.8mm、0.7mm、0.6mm. ............................................................52
Figure (52)Horizontal and vertical tool path milling direction. ................52
Figure (53)The measurement of pyramid shapes was conducted using equipment.(Scanning Electron Microscope , SEM) .........................53
Figure (54)Experimental equipment used for measuring pyramid shapes. ........53
Figure (55)Experimental equipment used for measuring pyramid shapes. (Bruker Dektak XT) ........................................................53
Figure (56)Schematic diagram of contact angle measurement. ................54
Figure (57)Contact angle measurement equipment. .........................54
Figure (58)Schematic simulation of cross milling path with a ball-end-mill. ......56
Figure (59)Schematic diagram of generating pyramid-shaped structures using ball-end-mill. ..........................................................56
Figure (60)Intentional generation of pyramid structures using a ball-end-mill.....57
Figure (61)Schematic diagram of measuring pyramid height using Dektak XT....57
Figure (62)Manufacturing pyramid height using a extra length 0.8mm diameter ball-end-mill. ..........................................................58
Figure (63)Manufacturing pyramid height using a extra length 0.7mm diameter ball-end-mill. ..........................................................59
Figure (64)Manufacturing pyramid height using a extra length 0.6mm diameter ball-end-mill. ..........................................................59
Figure (65)Copper、AL6061 pyramid microstructures.(SEM、Dektak XT) .....61
Figure (66)Schematic diagram of hydrophobic effect generated by pyramid microstructures. .....................................................63
Figure (67)Unprocessed copper and aluminum 6061 contact angle. ............63
Figure (68)Experiment for generating hydrophobic contact angles with pyramid shapes. ............................................................64
表目錄
Table (1)Experimental data for average burr of 0.8mm end-mill. ..............12
Table (2)Experimental data for average burr of 0.3mm and 0.4mm end-mill minimum wall thickness. ......................................................13
Table (3)Surface roughness experiment using a 0.8mm end-mill. ..............14
Table (4)Experimental data for surface roughness of 0.8、0.7、0.6mm ball-end-mill. ..............................................................15
Table (5)Data for 0.3mm and 0.4mm end-mill. ............................25
Table (6)Experimental data for pyramid generation using 0.8mm、0.7mm、0.6mm ball-end-mill on copper and aluminum 6061. ..............................54
Table (7)Yield Strength table for materials.(Copper、Aluminum 6061) .........55

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指導教授

曹嘉文(Chia-Wen,Tsao)

審核日期

2023-11-21

推文