開發垂直型無鉛鈣鈦礦結構應用於壓電元件設計

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姓名

陳奕勳(Yi-Hsun Chen) 查詢紙本館藏

畢業系所

生物醫學工程研究所

論文名稱

開發垂直型無鉛鈣鈦礦結構應用於壓電元件設計
(Development of Vertically Aligned Lead-Free Perovskites for Piezoelectric Applications)

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★ 層狀金屬硫化物設計之異質結構應用於壓電奈米發電機

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至系統瀏覽論文 (2029-8-19以後開放)

摘要(中)

近年來，無鉛鈣鈦礦材料 ( Lead-Free Perovskite ) 由於其簡易製程、無毒、以及壓電性質，已在壓電領域被廣泛研究，其中又以無機鹵素鈣鈦礦 ( Inorganic Halide Perovskite, IHP) 系統最受矚目。然而，傳統水溶液法製備之無機鹵素鈣鈦礦，雖具備高產率以及低溫製程等優點，但其結晶性、化學穩定性、與壓電特性之探討尚未清晰，阻礙其進一步技術發展。本研究中，我們首次使用化學氣相沉積法 ( Chemical Vapor Deposition , CVD ) 來製備高質量的 IHP。我們也藉由原子力顯微鏡技術進一步量測其壓電響應。此外，我們也應用 IHP 於壓電奈米發電機系統設計。此發電機系統不僅具備高靈敏度、自驅動、輕量化等優點，且可相容於織物基材，相信對於未來穿戴式裝置介面設計能帶來新的機會。

摘要(英)

In recent years, lead-free perovskite materials have been widely studied in the field of piezoelectricity due to their simple fabrication process, non-toxicity, and outstanding piezoelectric properties. Among them, the Inorganic Halide Perovskite (IHP) system has attracted the most attention. However, traditional solution methods to produce IHPs still suffer from low crystallinity, chemical instability, and unclear origin of the intrinsic piezoelectricity, which hinder further their development.
In this study, we utilized Chemical Vapor Deposition (CVD) to fabricate high-quality IHP. By using Piezoelectric Force Microscopy (PFM) to measure the piezoelectric response, the piezoelectricity of the IHP was confirmed. Additionally, we designed a piezoelectric nanogenerator system based on the derived IHP. This generator system not only possesses high sensitivity, self-driving capability, and lightweight, but also compatible with textile substrates. We believe it can bring new opportunities for future wearable devices.

關鍵字(中)

★ 無鉛鈣鈦礦
★ 壓電奈米發電機
★ 感測器

關鍵字(英)

論文目次

摘要 I
Abstract II
目錄 III
圖目錄 V
Abbreviations 英文縮寫說明 VIII
第一章緒論 1
1-1 無鉛鈣鈦礦材料 1
1-2 無機鹵素鈣鈦礦 2
1-3 壓電奈米發電機之原理 3
1-4 壓電奈米發電機之設計 4
1-5 研究動機 5
第二章文獻回顧 7
2-1 無鉛鈣鈦礦結構之製備技術 7
2-1-1 旋轉塗佈法 7
2-1-2 氣相輔助溶液法 8
2-1-3 化學氣相沉積法 10
2-2 化學氣相沉積法製備無鉛鈣鈦礦 11
2-3 無鉛鈣鈦礦之壓電奈米發電機 12
第三章材料合成方法與元件製程 14
3-1 實驗設備使用 14
3-2 材料鑑定之儀器 16
3-2-1 掃描式電子顯微鏡 16
3-2-2 拉曼光譜儀 17
3-2-3 X 光繞射儀 18
3-2-4 X 射線光電子能譜 19
3-2-5 壓電力顯微鏡 20
3-2-6 超高解析冷場發射掃描式電子顯微鏡 22
3-3 實驗方法與元件製程 23
3-3-1 兩步驟化學氣相沉積合成無鉛鈣鈦礦結構 23
3-3-2 元件製作與封裝 25
第四章結果與討論 27
4-1 無鉛鈣鈦礦微板結構之鑑定 27
4-1-1 無鉛鈣鈦礦微板結構之 SEM 影像 27
4-1-2 無鉛鈣鈦礦微板結構之拉曼光譜鑑定 27
4-1-3 無鉛鈣鈦礦微板結構之晶形鑑定 28
4-1-4 無鉛鈣鈦礦微板結構之元素組成分析 29
4-1-5 無鉛鈣鈦礦微板結構之成分分佈分析 29
4-1-6 無鉛鈣鈦礦微板結構之壓電響應測試 30
4-2 無鉛鈣鈦礦陣列形結構之鑑定 32
4-2-1 無鉛鈣鈦礦陣列形結構之 SEM 影像 32
4-2-2 無鉛鈣鈦礦陣列形結構之拉曼光譜鑑定 33
4-2-3 無鉛鈣鈦礦陣列形結構之晶形鑑定 33
4-2-4 無鉛鈣鈦礦陣列形結構之元素組成分析 34
4-2-5 無鉛鈣鈦礦陣列形結構之成分分佈分析 35
4-2-6 無鉛鈣鈦礦陣列形結構之壓電響應測試 35
4-3 壓電奈米發電機之輸出效能 36
第五章結論與未來展望 40
參考文獻 41

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指導教授

楊伯康

審核日期

2024-8-20

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