鈣鈦礦太陽能電池及具複合結構的奈米圓錐陣列的先進製程的開發

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姓名

黃佳婕(Chia-Chieh Huang) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

鈣鈦礦太陽能電池及具複合結構的奈米圓錐陣列的先進製程的開發
(Development of novel fabrication methods for Perovskite solar cells and composite nano-cone arrays)

相關論文

★ 奈米球鏡微影術應用於半導體光檢測器之研究

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至系統瀏覽論文 (2029-7-2以後開放)

摘要(中)

近年來鈣鈦礦深受業界的喜愛，除了可以應用在傳統能源，未來也可以應用在農業、建築、航太等不同領域。由於鈣鈦礦的吸光效率很高，可以將吸收到的光子快速的分離成電子及電洞，並傳遞到電極而生成電流，雖然鈣鈦礦的優點很多，但鈣鈦礦也十分容易受到環境的影響，不管是環境的濕度、溫度及光照都會使電池的效率降低。本研究提出一種改善鈣鈦礦太陽能電池效能的方式，我們使用兩步化學氣相沉積法將MAI沉積在事先準備好的PbI2薄膜上，藉此轉換成鈣鈦礦。

除此之外，我們也研究奈米球微影的製程步驟，我們使用實驗室的奈米球自組裝排列出大面積的奈米球週期陣列，利用黃光微影製程的曝光顯影來製作出光阻孔洞，並使用斜向蒸鍍Cr來維持孔洞大小及做為氧電漿蝕刻時光阻孔洞的保護層，再正向鍍SiO2、Ag來製作出足夠小顆的Ag，並在暗場顯微鏡下觀察金屬的散射光來確認disk上的銀是否足夠小顆。

摘要(英)

Perovskite solar cells have rapidly become a major research and development focuses for next generation solar cells technologies. One of the major advantages for perovskite solar cells is the relatively easy and low-cost to fabricate. In this research, we investigate a vacuum-based method to synthesize perovskite thin films. In addition, the electrical characteristics of perovskite solar cells fabricated using various method are also investigated. The second research topics in this research is to fabricate composite nano-cone arrays using Nanospherical-Lens Lithography. In this study, we modified the existing nanofabrication procedures by sequential evaporation of different materials to obtain composite nano-cone arrays. The effects of the initial diameters of the photoresist holes and the thickness of the evaporated materials are carefully investigated. The composite nano-cone arrays cover large area, which can be used in several topics in the field of Nanophotonics and biosensing.

關鍵字(中)

★ 鈣鈦礦
★ 奈米球鏡微影

關鍵字(英)

★ Perovskite solar cell
★ composite nano-cone arrays

論文目次

摘要 iii
Abstract iv
致謝 v
目錄 vi
圖目錄 viii
第一章緒論 1
1-1 研究動機與本文內容 1
1-2 太陽能電池工作原理 1
1-3 鈣鈦礦太陽能電池 6
1-4 奈米球鏡微影術 17
第二章製程及量測儀器 20
2-1 製程儀器 20
2-2 量測儀器 28
第三章鈣鈦礦太陽能電池實驗製程及量測 34
3-1 鈣鈦礦太陽能電池結構 34
3-2 鈣鈦礦太陽能電池元件蒸鍍流程 34
3-3 MAPbI3 爐管轉換參數 39
3-4 鈣鈦礦太陽能電池小元件量測結果 41
3-5 使用Parylene C製作鈣鈦礦太陽能電池元件圖案製程 43
3-6 使用雷雕機刻出鈣鈦礦圖案製程 50
第四章奈米球鏡微影術 54
4-1 實驗流程 54
4-2 光阻孔洞大小 57
4-3 SiO2縮洞 58
4-4 實驗結果 59
第五章結論與未來展望 62
5-1 結論 62
5-2 未來展望 62
第六章文獻回顧 64

參考文獻

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指導教授

賴昆佑張允崇(Kun-Yu Lai Yun-Chorng Chang)

審核日期

2024-7-29

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