超音波輔助微電化學加工製備微梨形工具技術之研究

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宋遠輊(Yuan-Zhi Sung) 查詢紙本館藏

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機械工程學系

論文名稱

超音波輔助微電化學加工製備微梨形工具技術之研究
(A Study on Micro Pear-shaped Tools Fabrication by Ultrasonic Assisted Micro Electrochemical Machining摧)

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至系統瀏覽論文 (2026-7-24以後開放)

摘要(中)

本論文為超音波輔助微電化學加工製備微梨形工具技術之研究，採用超音波輔助振動，製備碳化鎢微梨形工具。當採用線切割放電加工、燒結法等方式製備之微梨形工具時，會表面容易缺陷、高成本、需較長加工時間等問題，難以加工出尺寸精度及表面形貌較佳之微梨形工具，為了克服前述困難點，本論文設計出一三板片電極，並使用一向上噴流式電解液供給治具及超音波振動輔助，進行電化學加工製備微梨形工具，並探討工作電壓、上電極供電時間、脈衝休止時間及超音波功率格數等不同加工參數對微梨形工具整體形貌、最大徑、最小徑、橢圓長軸長1、橢圓長軸長2、消耗長、整體直徑差及橢圓度等各種加工特性之影響，並分析微梨形工具加工後之表面成分變化。
實驗結果顯示，採用超音波振動會產生泵吸作用，可加速加工間隙內之電解液更新，並快速移除加工間隙中的反應熱與各種電化學生成物，且相較於無超音波振動輔助，可得到較佳之微梨形工具形貌與較小微梨形工具尺寸。當採用本研究較佳之參數組合，即工作電壓9V、上電極板片供電時間20s、脈衝休止時間40μs及超音波功率格數15時，可得到較佳微梨形工具尺寸為最大徑181m、最小徑54m、橢圓長軸長1 168m、橢圓長軸長2 543m、消耗長1288m、橢圓度1.99與整體直徑差126m，並能有效改善微梨形工具整體形貌。

摘要(英)

This study prepared micro pear-shaped tools using ultrasonic-assisted micro electrochemical techniques. It used ultrasonic assisted vibration to prepare tungsten carbide micro pear-shaped tools. When wire-cutting electrical discharge machining, sintering process and other methods are adopted to prepare micro pear-shaped tools, but there are problems of likely forming of surface defects and high cost and requiring long processing time. Hence, it is difficult to process micro pear-shaped tools with better dimension precision and surface appearance. In order to overcome the above difficulties, this study designed a three-plate electrode, and employed jet flow electrolyte to supply fixture and assistance of ultrasonic-assisted vibration to prepare micro pear-shaped tools using electrochemical techniques. This study also discussed the influence of different machining parameters, such as working voltage, upper electrode power supply time, pulse off time and ultrasonic vibration stage, on various processing characteristics, such as maximum diameter, minimum diameter, ellipse major axis length 1, ellipse major axis length 2, consumption length, overall diameter difference and ellipticity. It further analyzed change of surface components of micro pear-shaped tools after machining.
Experimental results show that ultrasonic vibration has a pumping function, and it can accelerate electrolyte renewal in machining gap and rapidly remove reaction heat and various electrochemical products in machining gap. Comparing with the situation without assistance of ultrasonic vibration, better appearance of micro pear-shaped tools and smaller dimensions of micro pear-shaped tools can be obtained. Under parameter combination of working voltage of 9V, upper electrode power supply time of 20s, pulse off time of 40s, and ultrasonic vibration stage is 15, better dimensions of micro pear-shaped tools can be obtained (maximum diameter of 181m, minimum diameter of 54m, ellipse major axis length 1 of 168m, ellipse major axis length 2 of 543m, consumption length of 1288m, ellipticity of 1.99 and overall diameter difference of 126m), the overall appearance of micro pear-shaped can be improved effectively.

關鍵字(中)

★ 微梨形工具
★ 三板片電極
★ 超音波振動輔助
★ 碳化鎢

關鍵字(英)

★ Micro pear-shaped tools
★ three-plate electrode
★ ultrasonic vibration assistance
★ tungsten carbide

論文目次

目錄
摘要 i
ABSTRACT ii
誌謝 iv
目錄 v
圖目錄 viii
表目錄 xii
第一章緒論 1
1-1 研究背景 1
1-2 研究動機與目的 4
1-3 文獻回顧 7
1-4 論文架構 12
第二章實驗基礎原理 13
2-1 電化學加工基礎理論[6] 13
2-1-1 電化學反應機制 13
2-1-2 法拉第電解定律(Faraday’s Laws of Electrolysis) 16
2-1-3 電化學加工速率[30] 17
2-1-4 歐姆定律(Ohm’s law)與導電度 18
2-1-5 電極電位-金屬與溶液介面雙電層理論(Electrical Double Layer Theory)[27] 19
2-1-6 陽極極化曲線及其特徵 21
2-1-7 電流效率 23
2-1-8 脈衝電源與占空比(Duty fator) 24
2-2 超音波理論[26, 53] 25
2-2-1 泵吸作用(Pumping Effect) 25
2-2-2 空蝕作用(Cavitation) 27
2-2-3 超音波振動之運動分析 28
第三章實驗設備與材料 29
3-1 實驗簡介 29
3-2 實驗設備 30
3-2-1 電化學加工機 30
3-2-2 三用電表 32
3-2-3 去離子水系統 33
3-2-4 電子天平 35
3-2-5 電導度、酸鹼度、氧化還原電位計及其配件 35
3-2-6 石英加熱管與溫度計 37
3-2-7 高精度四軸CNC微放電加工機 38
3-2-8 電解液供給裝置 40
3-2-9 超音波主軸及發振器 41
3-2-10 超音波振幅量刀器 42
3-2-11 直流脈衝電源供應器 42
3-2-12 示波器 44
3-2-13 超音波清洗機 44
3-2-14 光學顯微影像量測系統 45
3-2-15 實體顯微鏡 46
3-3 實驗材料 46
3-3-1 三板片電極 46
3-3-2 碳化鎢棒 47
3-3-3 電解液 50
3-4 實驗流程與方法 51
3-4-1 電解液調配 53
3-4-2 碳化鎢棒準備 53
3-4-3 三板片電極製作 53
3-4-4 超音波振幅量測 54
3-4-5 實驗架設參數設定 55
3-4-6 實驗結果量測與觀察 57
3-4-7 示波器電流與電壓擷取時間 60
第四章結果與討論 61
4-1 工作電壓對電化學製備微梨形工具之品質特性影響 61
4-2 上電極板片供電時間對電化學製備微梨形工具之品質特性之影響 72
4-3 脈衝休止時間對電化學製備微梨形工具之品質特性之影響 81
4-4 超音波功率格數對電化學製備微梨形工具之品質特性之影響 90
4-5 微梨形工具表面EDX元素分析 100
第五章結論 102
未來展望 104
參考文獻 105

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指導教授

崔海平(Hai-Ping Tsui)

審核日期

2024-7-26

推文