深切緩進電化學放電加工於石英玻璃之創成特性研究

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姓名

曾怡駿(Yi-Jiun Tzeng) 查詢紙本館藏

畢業系所

機械工程學系在職專班

論文名稱

深切緩進電化學放電加工於石英玻璃之創成特性研究
(Research on the Creation Characteristics of Quartz Glass by Creep-Feed Electro-Chemical Discharge Machining)

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至系統瀏覽論文 (2030-1-20以後開放)

摘要(中)

本研究旨在探討電化學放電加工結合電腦數值控制輔助及深切緩
進技術在石英玻璃加工中的應用。傳統式電化學放電加工為分層式加
工，而本實驗嘗試使用深切緩進三軸同動的方式，直接完成直槽加工，
研究使用階段式片狀碳化鎢電極，對厚度為 2 mm 的石英玻璃進行加
工。研究的主要目的是分析不同加工參數:加工電壓、電解液濃度、初
始間隙、進給速度等對石英玻璃表面粗糙度、溝槽形貌、電極消耗、
材料移除率等進行詳細觀察，並根據實驗結果找出最佳的加工參數。
電化學放電加工利用了電解液與電極之間的放電作用實現對石英
玻璃的有效加工，實驗結果顯示，加工電壓對表面粗糙度有明顯影響。
初始間隙與溝槽的成型深度有密切關連。電解液濃度對溝槽的形貌有
顯著影響，進給速度則影響加工時間及擴槽量。
經過最佳化參數的設置後，所得到的溝槽形貌尺寸：溝槽寬度為
2.804 mm、溝槽長度為 1.172 mm、成型深度為 0.071 mm、表面粗糙
度為1.987 μm、材料移除率0.00065 g/min。深切緩進電化學放電加工
材料移除率0.00082 g/min，相較分層式電化學放電加工提升幅度17 %
的材料移除率。

摘要(英)

This study aims to explore the application of Electrochemical Discharge
Machining (ECDM) combined with Computer Numerical Control (CNC)
assistance and creep-feed technology in the machining of quartz glass.
Traditional ECDM uses a layer-by-layer machining approach, but this study
attempts to employ a creep-feed three-axis synchronized method to directly
machine straight grooves. A stepped sheet tungsten carbide electrode is used
to machine quartz glass with a thickness of 2 mm.
The primary objective of this research is to analyze the effects of
various machining parameters—such as machining voltage, electrolyte
concentration, initial gap, and feed rate—on the surface roughness, groove
morphology, electrode wear, and material removal rate of quartz glass.
Detailed observations are conducted, and optimal machining parameters are
identified based on experimental results.
ECDM utilizes the discharge action between the electrolyte and the
electrode to achieve effective machining of quartz glass. Experimental
results show that machining voltage significantly affects surface roughness,
the initial gap is closely related to the forming depth of the groove, and
electrolyte concentration has a significant impact on groove morphology.
Meanwhile, feed rate influences machining time and groove expansion.
After optimizing the machining parameters, the resulting groove
dimensions are as follows: groove width of 2.804 mm, groove length of
1.172 mm, forming depth of 0.071 mm, surface roughness of 1.987 μm, and
material removal rate of 0.00065 g/min. Using the creep-feed ECDM method,
II
the material removal rate increased to 0.00082 g/min, representing a 17%
improvement compared to the layer-by-layer ECDM method.

關鍵字(中)

★ 電化學放電加工
★ 電腦數值控制
★ 深切緩進
★ 石英玻璃

關鍵字(英)

★ electrochemical discharge machining
★ computer numerical control
★ Creep-Feed
★ quartz glass

論文目次

摘要 I
ABSTRACT II
目錄 V
圖目錄 IX
表目錄 XII
緒論 1
1-1 研究背景 1
1-2 研究動機與目的 3
1-3 文獻回顧 4
1-3-1 電化學放電加工機制、參數等相關文獻 4
1-3-2 深切緩進機制、參數等相關文獻 8
1-4 論文架構 10
第二章實驗基礎理論 11
2-1 化學蝕刻原理 11
2-2 放電加工原理 12
2-3 電化學放電加工原理 13
2-3-1 電化學放電加工之放電形成機制 15
2-4 電腦數值控制介紹 17
2-4-1 電腦數值控制程式設計、製作流程 18
2-5 深切緩進原理 19
第三章實驗設備與方法 20
3-1 實驗設備 20
1.ECDM加工系統 20
2.電腦數值控制設備 21
3.放電線切割機 21
4.直流電源供應器 22
5.電子天秤 22
6.超音波清洗機 23
7.雷射共軛焦兼白光干涉顯微鏡 24
8.半自動影像測定儀 25
9.濺鍍機 26
10.掃描式電子顯微鏡 27
3-2 實驗材料 28
1.工具電極 28
2.工件 29
3.輔助電極 30
4.電解液 31
3-3 微細片狀電極製作 32
3-4 試片製作 34
3-5 電解液調配 34
3-6 電解液液面高度控制 34
3-7 實驗流程與方法 35
3-8 實驗參數設定 38
3-9 量測方法 39
3-9-1 溝槽寬度(Width)量測: 39
3-9-2 溝槽長度(Length)量測: 39
3-9-3 溝槽深度(Depth)量測: 40
3-9-4 溝槽表面粗糙度(Surface roughness)量測: 40
結果與討論 41
4-1 不同電壓參數對電化學放電於石英玻璃加工溝槽之觀察 41
4-1-1 加工電壓選定 42
4-1-2 加工電壓觀察 43
4-2 初始間隙對加工深度之結果觀察 50
4-3 電解液濃度與工件表面之加工情形 54
4-4 不同進給速度與工件表面之加工結果 59
4-5 電極損耗 62
4-6 深切緩進與材料移除率探討 65
第五章結論 69
未來展望 71
參考文獻 72

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指導教授

洪榮洲(Jung-Chou Hung)

審核日期

2025-1-20

推文