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    請使用永久網址來引用或連結此文件: https://ir.lib.ncu.edu.tw/handle/987654321/100119


    題名: Current redistribution by intermetallic compounds in Through-Silicon-Via (TSV)
    作者: 吳子嘉;Tsai, C.Y.;Lou, B.Y.;Hsu, H.H.;Wu, Albert T.
    貢獻者: 工學院化學工程與材料工程學系
    關鍵詞: Computer modelling and simulation;Computer simulation;Corners;Deposition;Electrical properties;Failure analysis;Intermetallic compounds;Intermetallics;Mathematical analysis;Thin films
    日期: 2012-01-16
    上傳時間: 2026-04-21 13:50:05 (UTC+8)
    出版者: Elsevier BV;Elsevier B.V
    摘要: 摘要: ► The intermetallic compound, Al 2Cu, has similar resistivity with Ni. ► The growth of the intermetallic compound, Al 2Cu, detours the current paths and reduces the current crowding. ► A mathematic model successfully predicts the occurrence of early failure in the samples, based on the methodology. ► Simulation results proved the experimental phenomena and the mathematic analyses. Bi-metallic thin film redistribution layers, deposited in the Through-Silicon-Via (TSV), were stressed by electrical current for failure analysis. A new mechanism suggested that the formation of intermetallic compounds, at the corners of the vias, redistributed and reduced the electrical current at the current crowding region. This study proposes a model and deduces a kinetic analysis to demonstrate the effect of the current distribution caused by the volume of the compound. A simulation was used to substantiate the experimental and analytical results.
    出版者: Elsevier B.V
    出版日期: 2012-01-16
    出處: Materials chemistry and physics, 2012-01, Vol.132 (1), p.162-165
    版權: 2011 Elsevier B.V.
    識別號: ISSN: 0254-0584
    識別號: EISSN: 1879-3312
    識別號: DOI: 10.1016/j.matchemphys.2011.11.017
    顯示於類別:[化學工程與材料工程學系 ] 期刊論文

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