摘要： •Highly textured surface tin oxide thin films were deposited on glass substrates using atmospheric pressure chemical vapor deposition.•The nozzle-spraying process caused a flower-like double texture surface.•The optimum nanoparticle-coated tin oxide thin films have a haze value of 35%.•The crystalline structure of the film was affected by the orientations of the pre-coated nanoparticles on the substrates.•The growth kinetics was discussed. High-texture surface tin oxide transparent conductive oxide thin films were directly deposited using the atmospheric pressure chemical vapor deposition technique on nanoparticle-coated glass substrates. A simple nozzle-spraying process was developed for the tin oxide nanoparticle coating process for the high-texture tin oxide thin films. The nozzle-spraying process caused the surface morphology of the tin oxide films to change from a pyramidal shape to a flower-like double texture. The optimum nanoparticle-coated tin oxide thin films have a haze value of 35.0±4.0% and an average visible optical transmittance of 80.6±2.2% in the wavelength range of 400–900nm. The carrier concentration and mobility of the film were 1.3±0.3×1020cm−3 and 4.0±0.6cm2V−1s−1, respectively. The morphological evolution of the tin oxide thin films was apparent on the hetero-surface of the amorphous glass and multicrystalline tin oxide nanoparticle. This result indicates that the crystalline tin oxide nanoparticle has an important role in the fabrication of the flower-like double texture, and the texture tin oxide thin films are promising transparent conductive oxide materials for thin film solar cells. 出版者： Amsterdam: Elsevier B.V 出版日期： 2013-07-15 出處： Applied surface science, 2013-07, Vol.277, p.30-34 版權： 2013 Elsevier B.V. 版權： 2014 INIST-CNRS 識別號： ISSN: 0169-4332 識別號： EISSN: 1873-5584 識別號： DOI: 10.1016/j.apsusc.2013.03.100
