Fabrication and properties of well-ordered arrays of single-crystalline NiSi2 nanowires and epitaxial NiSi2/Si heterostructures

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Title:	Fabrication and properties of well-ordered arrays of single-crystalline NiSi2 nanowires and epitaxial NiSi2/Si heterostructures
Authors:	鄭紹良;Chuang, Chenfu;Cheng, Shaoliang
Contributors:	工學院化學工程與材料工程學系
Keywords:	Atomic/Molecular Structure and Spectra;Biomedicine;Biotechnology;Chemistry and Materials Science;Condensed Matter Physics;Materials Science;Nanotechnology;Research Article;Si衬底;单晶体结构;垂直排列;异质结构;有序排列;硅化程度;结构性能;镍纳米线
Date:	2014-11-21
Issue Date:	2026-04-21 14:29:56 (UTC+8)
Publisher:	Tsinghua University Press;Heidelberg: Tsinghua University Press
Abstract:	摘要： In this study, we reported the design, fabrication, and characterization of well- ordered arrays of vertically-aligned, epitaxial NiSi2/Si heterostructures and single- crystalline NiSi2 nanowires on （001）Si substrates. The epitaxial NiSi2 with {111} facets was found to be the first and the only silicide phase formed inside the Si nanowires after annealing at a temperature as low as 300℃. Upon annealing at 500 ℃ for 4 h, the residual parts of Si nanowires were completely consumed and the NiSi2/Si heterostructured nanowires were transformed to fully silicided NiSi2 nanowires. XRD, TEM and SAED analyses indicated that all the NiSi2 nanowires were single crystalline and their axial orientations were parallel to the [001] direction. The obtained vertically-aligned NiSi2 nanowires, owing to their well-ordered arrangement, single-crystalline structure, and low effective work function, exhibit excellent field-emission properties with a very low turn-on field of 1.1 V/m. The surface wettability of the nanowires was found to switch from hydrophobic to hydrophilic after the formation of NiSi2 phase and the measured water contact angle decreased with increasing extent of Ni silicidation. The increased hydrophilicity can be explained by the Wenzel model. The obtained results present the exciting prospect that the new approach proposed here will provide the capability to fabricate other highly-ordered, vertically-aligned fully silicided nanowire arrays and may offer potential applications in constructing vertical silicide-based nanodevices. 其他題名： Nano Res 其他題名： Nano Research 出版者： Heidelberg: Tsinghua University Press 出版日期： 2014-11-01 出處： Nano research, 2014-11, Vol.7 (11), p.1592-1603 版權： Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2014 識別號： ISSN: 1998-0124 識別號： EISSN: 1998-0000 識別號： DOI: 10.1007/s12274-014-0519-7
Appears in Collections:	[Department of Chemical and Materials Engineering] journal & Dissertation

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