Application of white-light scanning interferometer on transparent thin-film measurement

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题名:	Application of white-light scanning interferometer on transparent thin-film measurement
作者:	李孟錡;Li, Meng-Chi;Wan, Der-Shen;Lee, Cheng-Chung
贡献者:	光電科學研究中心
关键词:	Amplitudes;Constants;Error analysis;Film thickness;Fourier analysis;Interferometry;Nonuniformity;Refractivity;Thin films
日期:	2012-12-20
上传时间:	2026-04-23 11:20:59 (UTC+8)
出版者:	The Optical Society;United States: Optica Publishing Group
摘要:	摘要： A method to measure thin-film thickness, refractive index, and dispersion constants based on white-light interferometry is described. The thin-film property is retrieved from the Fourier amplitude of the white-light correlogram. The sources of errors in Fourier amplitude, which include the accuracy of wave number, light source variation in time, and illumination nonuniformity, are investigated. With all these errors reduced, the film thicknesses and refractive indices of four samples measured by white-light interferometry are within 1% of the ellipsometry results. 其他題名： Appl Opt 出版者： United States: Optica Publishing Group 出版日期： 2012-12-20 出處： Applied Optics, 2012-12, Vol.51 (36), p.8579--8586 資源來源： Optica Journals (NTUSG) 識別號： ISSN: 1559-128X 識別號： EISSN: 2155-3165 識別號： EISSN: 1539-4522 識別號： DOI: 10.1364/ao.51.008579 識別號： PMID: 23262597
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