Controllable photonic mirror fabricated by the atomic layer deposition on the nanosphere template

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/103186

Title:	Controllable photonic mirror fabricated by the atomic layer deposition on the nanosphere template
Authors:	郭倩丞;Chan, Shih-Hao;Lin, Wei-Ting;Cho, Wen-Hao;Kuo, Chien-Cheng;Lee, Cheng-Chung;Chen, Sheng-Hui
Contributors:	理學院光電科學與工程學系
Keywords:	Coating;Deposition;Electrodes;Nanospheres;Nanostructure;Photonics;Polystyrene resins;Stability
Date:	2014-02-01
Issue Date:	2026-04-23 11:25:11 (UTC+8)
Publisher:	The Optical Society;United States
Abstract:	摘要： In this study, a controllable photonic mirror was fabricated using the atomic layer deposition (ALD) coating technique on a polystyrene (PS) nanosphere template. PS nanospheres were self-assembled on an Al/glass substrate to form the bottom electrode. A 20 nm ALD Al2O3 film was then coated onto the surface of the reduced PS nanosphere structure. The PS nanospheres were removed in air at 350°C to form hollow Al2O3 nanospheres. Then a 30 nm indium tin oxide film was sputtered on the hollow nanosphere structure to form the top electrode. The results show that the incorporation of the photonic mirror could control the reflectance to a value of 0.3% per 0.1 V of bias voltage. 其他題名： Appl Opt 出版者： United States 出版日期： 2014-02-01 出處： Applied optics (2004), 2014-02, Vol.53 (4), p.A237-A241 資源來源： Optica Publishing Group Journals 識別號： ISSN: 1559-128X 識別號： EISSN: 2155-3165 識別號： EISSN: 1539-4522 識別號： DOI: 10.1364/AO.53.00A237 識別號： PMID: 24514221
Appears in Collections:	[Department of Optics and Photonics] journal & Dissertation

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