Controllable photonic mirror fabricated by the atomic layer deposition on the nanosphere template

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题名:	Controllable photonic mirror fabricated by the atomic layer deposition on the nanosphere template
作者:	陳昇暉;Chan, Shih-Hao;Lin, Wei-Ting;Cho, Wen-Hao;Kuo, Chien-Cheng;Lee, Cheng-Chung;Chen, Sheng-Hui
贡献者:	理學院光電科學與工程學系
关键词:	Coating;Deposition;Electrodes;Nanospheres;Nanostructure;Photonics;Polystyrene resins;Stability
日期:	2014-02-01
上传时间:	2026-04-23 11:25:14 (UTC+8)
出版者:	The Optical Society;United States
摘要:	摘要： In this study, a controllable photonic mirror was fabricated using the atomic layer deposition (ALD) coating technique on a polystyrene (PS) nanosphere template. PS nanospheres were self-assembled on an Al/glass substrate to form the bottom electrode. A 20 nm ALD Al2O3 film was then coated onto the surface of the reduced PS nanosphere structure. The PS nanospheres were removed in air at 350°C to form hollow Al2O3 nanospheres. Then a 30 nm indium tin oxide film was sputtered on the hollow nanosphere structure to form the top electrode. The results show that the incorporation of the photonic mirror could control the reflectance to a value of 0.3% per 0.1 V of bias voltage. 其他題名： Appl Opt 出版者： United States 出版日期： 2014-02-01 出處： Applied optics (2004), 2014-02, Vol.53 (4), p.A237-A241 資源來源： Optica Publishing Group Journals 識別號： ISSN: 1559-128X 識別號： EISSN: 2155-3165 識別號： EISSN: 1539-4522 識別號： DOI: 10.1364/AO.53.00A237 識別號： PMID: 24514221
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