摘要： •Annealing-induced shape recovery of thin film metallic glass is examined.•Shape recovery becomes obvious with increasing temperature and holding time.•Minimum roughness is obtained when annealed within supercooled liquid region.•The amount of free volume in the film plays a role for the shape recovery.•The numerical simulation confirms the shape recovery upon annealing. The shape recovery property of a sputtered Zr50.3Cu28.1Al14Ni7.6 (in at.%) thin film metallic glass upon heating is examined. Due to the surface tension-driven viscous flow, the shape of indentation appears to recover to different extents at various temperatures and holding times. It is found that a maximum of 59.8% indentation depth recovery is achieved after annealing within the supercooled liquid region (SCLR). The amount of free volume in the film is found to play a role in the recovery. Atomic force microscopy results reveal a decrease in film roughness to a minimum value within SCLR. To elucidate the experimentally observed shape recovery, a numerical modeling has been employed. It is evident that the depressed region caused by indentation is elevated after annealing. 出版者： Kidlington: Elsevier B.V 出版日期： 2014-11-15 出處： Journal of alloys and compounds, 2014-11, Vol.613, p.157-163 版權： 2014 Elsevier B.V. 版權： 2015 INIST-CNRS 識別號： ISSN: 0925-8388 識別號： EISSN: 1873-4669 識別號： DOI: 10.1016/j.jallcom.2014.06.048
