摘要： This paper reports the successful fabrication of flexible replicas with polymeric nanopillars using a process that combines nanosphere lithography, dry deep etching, soft-lithography, nanomolding and hydrophobic modification. The polymeric nanopillars with various sizes and three different periodicities have been implemented for systematic investigations on the interfacial properties on those surfaces. Such a flexible polymeric surface exhibited the maximum static contact angle of 166.8° at the nanopillars with a diameter of 60 nm, height of 710 nm and periodicity of 300 nm. The optimum aspect ratio should be less than 7 to avoid defects and collapses among those polymeric nanopillars during nanomolding. Metastable contact at the transition state indeed occurred on the parts of the intrinsic nanopillars, the experimental results of which also matched well to the classical theory of critical contact angle. Using hydrophobic modifications, metastable contacts among those polymeric nanopillars have further been eliminated. The polymeric nanopillars reported here were verified as having very strong adhesion as well as superhydrophobicity because such nanopillars made microdroplets hang firmly on the vertical surfaces of those designed replicas. 其他題名： JMM 其他題名： J. Micromech. Microeng 出版者： Bristol: IOP Publishing 出版日期： 2012-12-01 出處： Journal of micromechanics and microengineering, 2012-12, Vol.22 (12), p.125026-11 資源來源： Institute of Physics Journals 版權： 2012 IOP Publishing Ltd 版權： 2014 INIST-CNRS 識別號： ISSN: 0960-1317 識別號： EISSN: 1361-6439 識別號： DOI: 10.1088/0960-1317/22/12/125026 識別號： CODEN: JMMIEZ
