摘要： The subaperture stitching interferometer is a flexible testing device that measures either high-numerical-aperture or large aperture optics without the requirement of additional auxiliary optics. In the measurement, the interferometer reference optics error can contaminate the stitched phase of the complete tested optics and reduce measurement accuracy. We propose high-overlapping-density subaperture stitching interferometry (HOD-SSI) to reduce the impact of reference optics errors on the stitched phase. The tested optics surface deformation phase is determined by averaging the multiple subaperture measurements taken at different rotational angles. Simulation and experiment show that HOD-SSI can effectively reduce the stitched phase errors due to the static reference optics errors. 其他題名： Appl Opt 出版者： United States 出版日期： 2014-10-10 出處： Applied optics (2004), 2014-10, Vol.53 (29), p.H220-H226 資源來源： Optica Publishing Group Journals 識別號： ISSN: 1559-128X 識別號： EISSN: 2155-3165 識別號： EISSN: 1539-4522 識別號： DOI: 10.1364/AO.53.00H220 識別號： PMID: 25322423
