摘要： An iterative phase-shifting algorithm based on the least-squares principle is developed to overcome the random piston and tilt wavefront errors generated from the phase shifter. The algorithm iteratively calculates the phase distribution and the phase-shifting map to minimize the sum of squared errors in the interferograms. The performance of the algorithm is evaluated via computer simulations and validated by the Fizeau interferometer measurements. The results show that the proposed algorithm has a fast convergence rate and satisfactory phase-estimation accuracy, improving the measurement precision of the phase-shifting interferometers with significant phase-shifter errors. 其他題名： Appl Opt 出版者： United States 出版日期： 2013-05-10 出處： Applied optics (2004), 2013-05, Vol.52 (14), p.3381-3386 資源來源： Optica Publishing Group Journals 識別號： ISSN: 1559-128X 識別號： EISSN: 2155-3165 識別號： EISSN: 1539-4522 識別號： DOI: 10.1364/AO.52.003381 識別號： PMID: 23669854
