摘要： One thin film of Mn-doped ZnO was deposited on a quartz glass in a sputtering system where RF magnetron and DC were employed as power sources. The specimen was removed and annealed in an atmospheric furnace at 1200 °C for 2 h. This annealed specimen was identified as Mn-doped Zn 2 SiO 4 (MZS) crystal. The sample was sputtered to coat it with one Ag film varying in thickness (i.e., 3, 5, and 10 nm), and subjected to rapid thermal annealing (RTA) at 500 °C for 15 min. The post-RTA-treated specimens were denoted as 3 Ag(MZS)R, 5 Ag(MZS)R, and 10 Ag(MZS)R, and their surfaces revealed a homogenous distribution of silver nanoparticles. Photoluminescence (PL) measurement showed a fluorescence of 530 nm (green light) emitted from MZS. A coating of Ag particles on MZS tended to increase the PL intensity in the following order: 10 Ag(MZS)R (29%) < 5 Ag(MZS)R (72%) < 3 Ag(MZS)R (100%). 出版日期： 2013-01-01 出處： Japanese Journal of Applied Physics, 2013-01, Vol.52 (1S), p.1 資源來源： Institute of Physics Journals 識別號： ISSN: 0021-4922 識別號： EISSN: 1347-4065 識別號： DOI: 10.7567/JJAP.52.01AC02
