摘要： The vibration-modulated subaperture stitching interferometer acquires the interferogram on the fly dynamically. With its highly improved measurement throughput, we applied the device for high overlapping density subaperture stitching interferometry to acquire hundreds of overlapping subapertures in a single phase stitching measurement. The averaging effect of the high overlapping density stitching interferometer is discussed. In the experiment, the proposed high overlapping density stitching interferometer is also proved to reduce measurement uncertainty and improve measurement quality effectively. 其他題名： Appl Opt 出版者： United States 出版日期： 2014-10-10 出處： Applied optics (2004), 2014-10, Vol.53 (29), p.H102-H108 資源來源： Optica Publishing Group Journals 識別號： ISSN: 1559-128X 識別號： EISSN: 2155-3165 識別號： EISSN: 1539-4522 識別號： DOI: 10.1364/AO.53.00H102 識別號： PMID: 25322405
