摘要： Omni-directional reflectors (ODRs) for deep blue LED were designed and fabricated using symmetric autocloning method. The symmetric stack multi-layers for the reflectors were designed by finite-difference time-domain simulation. The fabricating process of ODR is combined with the techniques of anodic aluminum oxide (AAO) process and autocloning method. The two-dimensional structure template of nano-channel array was grown using AAO with the period of 150 nm. Then the shaping layer was deposited on the AAO template by evaporation deposition. Besides, the ion etching was applied to modify the apex angle to the triangle shape at 100°. Finally, the sub/(0.5TiO 2 SiO 2 0.5TiO 2 ) 8 multi-layer stack was deposited on the shaping layer using autocloning method to achieve the ODR. The results show the reflective spectra of ODR at the incident angles of 0, 30, 45, and 60° had high values within the range 400–450 nm. Besides, the central wavelength shifting is not obvious which is very good for keeping the color of LED stable. 其他題名： OPT REV 出版者： Japan: Optical Society of Japan 出版日期： 2013-03-01 出處： Optical review, 2013-03, Vol.20 (2), p.141-144 版權： The Optical Society of Japan 2013 識別號： ISSN: 1340-6000 識別號： EISSN: 1349-9432 識別號： DOI: 10.1007/s10043-013-0021-6
