Replication of nano/micro-scale features using bulk metallic glass mold prepared by femtosecond laser and imprint processes

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Title:	Replication of nano/micro-scale features using bulk metallic glass mold prepared by femtosecond laser and imprint processes
Authors:	鄭憲清;Chen, Y C;Chu, J P;Jang, J S C;Hsieh, C W;Yang, Y;Li, C L;Chen, Y M;Jeng, J Y
Contributors:	工學院材料科學與工程研究所
Keywords:	Amorphous materials;bulk metallic glass;Cross-disciplinary physics: materials science;rheology;Exact sciences and technology;Femtosecond;femtosecond laser;Lasers;Materials science;MEMS;Metallic glasses;Methods of nanofabrication;Molds;nanoimprint processing;Nanoscale pattern formation;Nanostructure;Palladium;Physics;Replication
Date:	2013-03-01
Issue Date:	2026-04-23 11:43:46 (UTC+8)
Publisher:	IOP Publishing Ltd.;Bristol: IOP Publishing
Abstract:	摘要： This study describes the replication of nano micro-scale features using a Pd40Ni40P20 bulk metallic glass (BMG) mold prepared using a femtosecond laser and nanoimprinting process. The use of the beam shaper feature of the femtosecond laser enabled the rapid fabrication of periodic nanostripes over an area of ∼5 × 4 mm2 on the BMG mold following a single pulse of irradiation. The ablation pitch of the nanostructure irradiated with 100 mW of femtosecond laser power was determined to be 175.8 nm. The imprinting results demonstrate the applicability of Pd-based BMG in the replication of mold features ranging from 100 µm to 90 nm. Additionally, Pd-based BMG can itself be used as a mold to transfer features onto Au-based BMG and polydimethylsiloxane, where the results could be used to ascertain the workability of BMG for molding in a nano micro-imprint process. 其他題名： JMM 其他題名： J. Micromech. Microeng 出版者： Bristol: IOP Publishing 出版日期： 2013-03-01 出處： Journal of Micromechanics and Microengineering, 2013-03, Vol.23 (3), p.35030-8 資源來源： Institute of Physics Journals 版權： 2013 IOP Publishing Ltd 版權： 2014 INIST-CNRS 識別號： ISSN: 0960-1317 識別號： EISSN: 1361-6439 識別號： DOI: 10.1088/0960-1317/23/3/035030 識別號： CODEN: JMMIEZ
Appears in Collections:	[Institute of Materials Science and Engineering] journal & Dissertation

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