Self-suspended micro-resonators patterned in Z-cut lithium niobate membranes

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/104153

Title:	Self-suspended micro-resonators patterned in Z-cut lithium niobate membranes
Authors:	陳彥宏;Diziain, Séverine;Geiss, Reinhard;Steinert, Michael;Schmidt, Carsten;Chang, Wei-Kun;Fasold, Stefan;Füßel, Daniel;Chen, Yen-Hung;Pertsch, Thomas
Contributors:	理學院光電科學與工程學系
Keywords:	Holes;Lithium niobates;Mathematical analysis;Mathematical models;Membranes;Photonic crystals;Telecommunications;Three dimensional
Date:	2015-01-01
Issue Date:	2026-04-23 11:44:36 (UTC+8)
Publisher:	The Optical Society
Abstract:	摘要： We report on self-suspended micro-resonators patterned in Z-cut lithium niobate on insulator substrates. The fabrication technique consists of two single steps, focused ion beam milling for the micro- and nano-structuring and subsequent SiO sub(2) etching for the realization of thin self-suspended membranes. The fabrication process of a free-standing photonic crystal cavity and a suspended micro-disk is described and the linear and nonlinear optical properties of the micro-resonators are investigated at telecommunication wavelengths. The whispering gallery modes of the micro-disk are measured experimentally and compared to an analytical model. The fundamental transverse-electric polarized mode of the photonic crystal cavity is measured and compared to three dimensional finite difference time domain simulations. Second harmonic generation enhancement due to the field confinement in the cavity mode is demonstrated. These results are promising for the use of Z-cut lithium niobate self-suspended membranes as platforms for highly efficient miniaturized photonic devices for telecommunication applications. 出版日期： 2015-09-01 出處： Optical materials express, 2015-09, Vol.5 (9), p.2081-2089 資源來源： Optica Publishing Group Journals 識別號： ISSN: 2159-3930 識別號： EISSN: 2159-3930 識別號： DOI: 10.1364/OME.5.002081
Appears in Collections:	[Department of Optics and Photonics] journal & Dissertation

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