The analysis of the deposition rate for continuous micro-anode guided electroplating process

NCUIR > Engineering College > Institute of Materials Science and Engineering > journal & Dissertation > Item 987654321/104254

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/104254

Title:	The analysis of the deposition rate for continuous micro-anode guided electroplating process
Authors:	林景崎;Hwang, Yean-Ren;Lin, Jing-Chie;Chen, Ting-Chao
Contributors:	工學院材料科學與工程研究所
Keywords:	CCD image;Electrochemistry;electroplating;real time control;system identification
Date:	2012-02-01
Issue Date:	2026-04-23 11:46:30 (UTC+8)
Publisher:	Electrochemical Science Group;Elsevier B.V
Abstract:	摘要： The continuous micro-anode guided electroplating (MAGE) has been improved by using real time control of anode’s elevation rate based on CCD images in the previous research. However, the effects of choosing different process parameters, such as the applied voltage and the gap distance between the anode and column, had not been fully discussed in the previous work. In order to manage the electroplating process and obtain the desired column, the relations between the column’s geometry and the process parameters are investigated in this paper. The experiment results show that the deposition rate is related to the gap distances as well as the applied voltages. By implementing the system identification and curve fitting techniques, the transfer functions between the applied voltage and the column deposition rates are established for different gap distances. Based on these functions and the on-line CCD images, the anode position and the applied voltage will be adjusted real time to maintain constant gap distance and obtain the desired column geometries. 出版者： Elsevier B.V 出版日期： 2012-02 出處： International Journal of Electrochemical Science, 2012-02, Vol.7 (2), p.1359-1370 資源來源： Directory of Open Access Journals (DOAJ) 版權： 2012 The Authors. Published by ESG 識別號： ISSN: 1452-3981 識別號： EISSN: 1452-3981 識別號： DOI: 10.1016/S1452-3981(23)13419-5
Appears in Collections:	[Institute of Materials Science and Engineering] journal & Dissertation

Files in This Item:

File	Description	Size	Format
index.html		0Kb	HTML	15	View/Open

社群 sharing

Loading...