The effects of annealing temperature and sputtering power on the structure and magnetic properties of the Co-Fe-Zr-B thin films

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Title:	The effects of annealing temperature and sputtering power on the structure and magnetic properties of the Co-Fe-Zr-B thin films
Authors:	鄭憲清;Chen, Guo-Ju;Jian, Sheng-Rui;Jang, Jason Shian-Ching;Shih, Yung-Hui;Chen, Yuan-Tsung;Jen, Shien-Uang;Juang, Jenh-Yih
Contributors:	工學院材料科學與工程研究所
Keywords:	Annealing;B. Glasses, metallic;B. Magnetic properties;B. Thermal stability;Cobalt;Coercive force;Coercivity;F. Calorimetry;F. Microscopy;Magnetic properties;Microstructure;Superconducting quantum interference devices;Thin films
Date:	2012-11-01
Issue Date:	2026-04-23 11:47:22 (UTC+8)
Publisher:	Elsevier Ltd.;Elsevier Ltd
Abstract:	摘要： The microstructure and magnetic properties of the amorphous Co-Fe-Zr-B thin films grown on glass substrates by dc magnetron sputtering are investigated using differential scanning calorimetry (DSC), transmission electron microscopy (TEM), and superconducting quantum interference device (SQUID) techniques. The Co-Fe-Zr-B thin films deposited at room temperature were annealed at temperatures ranged from 683 K to 773 K. Experimental results indicated that the coercivity (Hc) of the Co-Fe-Zr-B thin films is significantly influenced by residual stress and crystalline phases within the films. The correlation of the coercivity and the microstructure of Co-Fe-Zr-B thin films are discussed. After annealed at 683 K, the coercivity of the Co-Fe-Zr-B film was as low as 1.2 Oe. 出版者： Elsevier Ltd 出版日期： 2012-11-01 出處： Intermetallics, 2012-11, Vol.30, p.127-131 版權： 2012 Elsevier Ltd 識別號： ISSN: 0966-9795 識別號： DOI: 10.1016/j.intermet.2012.03.017
Appears in Collections:	[Institute of Materials Science and Engineering] journal & Dissertation

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