Vibration modulated subaperture stitching interferometry

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/104439

Title:	Vibration modulated subaperture stitching interferometry
Authors:	陳怡君;Liang, Chao-Wen;Chang, Hung-Sheng;Lin, Po-Chih;Lee, Cheng-Chung;Chen, Yi-Chun
Contributors:	理學院光電科學與工程學系
Keywords:	Computer Simulation;Computer-Aided Design;Equipment Design;Equipment Failure Analysis;Feasibility Studies;Interferometry - instrumentation;Lenses;Light;Micro-Electrical-Mechanical Systems - instrumentation;Models, Theoretical;Scattering, Radiation
Date:	2013-07-29
Issue Date:	2026-04-23 11:50:15 (UTC+8)
Publisher:	United States: Optica Publishing Group
Abstract:	摘要： A novel subaperture stitching interferometry is developed to measure the surface deformation of the lens by utilizing the mechanical vibration induced from a motorized stage. The interferograms of different subapertures are acquired on the fly while the tested optics is rotating against its symmetrical axis. The measurement throughput and the subaperture positioning accuracy are improved simultaneously by adopting both the synchronous rotational scanning mechanism and the non-uniform phase shifting algorithm. The experimental measurement shows the stitched phase RMS error of 0.0037 waves proving the feasibility of the proposed phase acquisition method. 其他題名： Opt Express 出版者： United States: Optica Publishing Group 出版日期： 2013-07-29 出處： Optics Express, 2013-07, Vol.21 (15), p.18255- 資源來源： Optica Publishing Group Journals 識別號： ISSN: 1094-4087 識別號： EISSN: 1094-4087 識別號： DOI: 10.1364/oe.21.018255 識別號： PMID: 23938696
Appears in Collections:	[Department of Optics and Photonics] journal & Dissertation

Files in This Item:

File	Description	Size	Format
index.html		0Kb	HTML	28	View/Open

社群 sharing

Loading...