Self-organized nanoparticle photolithography for two-dimensional patterning of organic light emitting diodes

NCUIR > Engineering College > Energy of Mechatronics > journal & Dissertation > Item 987654321/104981

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/104981

Title:	Self-organized nanoparticle photolithography for two-dimensional patterning of organic light emitting diodes
Authors:	詹佳樺;Ayenew, Getachew T.;Fischer, Alexis P. A.;Chan, Chia-Hua;Chen, Chii-Chang;Chakaroun, Mahmoud;Solard, Jeanne;Peng, Lung-Han;Boudrioua, Azzedine
Contributors:	工學院能源工程研究所
Keywords:	Crystallization - methods;Energy Transfer;Equipment Design;Equipment Failure Analysis;Lenses;Lighting - instrumentation;Materials Testing;Miniaturization;Nanoparticles - chemistry;Nanoparticles - ultrastructure;Organic Chemicals - chemistry;Photography - methods;Printing, Three-Dimensional;Semiconductors;Silicon Dioxide - chemistry;Surface Properties
Date:	2014-01-01
Issue Date:	2026-04-23 12:03:01 (UTC+8)
Publisher:	United States: Optica Publishing Group
Abstract:	摘要： We report a new simple and inexpensive sub-micrometer two dimensional patterning technique. This technique combines a use of a photomask featured with self-organized particles in the micro- to nano-meter size range and a photoresist-covered substrate. The photomask was prepared by depositing monodispersed silicon dioxide (SiO(2))- or polystyrene- spheres on a quartz substrate to form a close-packed pattern. The patterning technique can be realized in two configurations: a hard-contact mode or a soft-contact mode. In the first configuration, each sphere acts as a micro ball-lens that focuses light and exposes the photoresist underneath the sphere. The developed pattern therefore reproduces exactly the same spatial arrangement as the close-packed spheres but with a feature size of developed hole smaller than the diameter of the sphere. In the soft-contact mode, an air gap of few micrometers thick is introduced between the 2D array of self-organized spheres and the photoresist-covered substrate. In this case, a phase mask behavior is obtained which results in an exposure area with a lattice period being half of the sphere diameter. A 2D lattice structure with period and feature size of a developed hole as small as 750 nm and 420 nm, respectively, was realized in this configuration. We further applied this technique to host the deposition of organic films into the 2D nanostructure and demonstrated the realization of green and red nano-structured OLEDs. 其他題名： Opt Express 出版者： United States: Optica Publishing Group 出版日期： 2014-10-20 出處： Optics Express, 2014-10, Vol.22 (S6), p.A1619- 資源來源： Optica Publishing Group Journals 識別號： ISSN: 1094-4087 識別號： EISSN: 1094-4087 識別號： DOI: 10.1364/oe.22.0a1619 識別號： PMID: 25607319
Appears in Collections:	[Energy of Mechatronics] journal & Dissertation

Files in This Item:

File	Description	Size	Format
index.html		0Kb	HTML	25	View/Open

社群 sharing

Loading...