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    题名: Design and control of phase-detection mode atomic force microscopy for reconstruction of cell contours in three dimensions
    作者: 吳俊緯;Wu, Jim-Wei;Chen, Jyun-Jhih;Chiang, Ming-Li;Yu, Jen-te;Fu, Li-Chen
    贡献者: 資訊電機學院電機工程學系
    关键词: Atomic force microscopy;Contours;Controllers;Cross coupling;Force;Hysteresis;Microscopes;Microscopy;Nanostructure;Nanotechnology;Reconstruction;Scanning;Sliding mode control;Surface topography;Three dimensional;Uncertainty
    日期: 2014-07-01
    上传时间: 2026-04-23 13:48:31 (UTC+8)
    出版者: Institute of Electrical and Electronics Engineers Inc.;New York: IEEE
    摘要: 摘要: Atomic force microscopy (AFM) is capable of producing accurate 3-D images at nanometer resolution. As a result, AFM is widely used in applications related to cell biology, such as the diagnosis and observation of tumor cells. This paper proposes phase-detection mode atomic force microscopy (PM-AFM) for the 3-D reconstruction of cell contours. The proposed three-axis scanning system employs two piezoelectric stages with one and two degrees of freedom, respectively. Accurately rendering the contours of delicate cells required a multi-input multi-output (MIMO) adaptive double integral sliding mode controller (ADISMC) in the xy-plane to overcome uncertainties within the system as well as cross-coupling, hysteresis effect, and external disturbance. An adaptive complementary sliding-mode controller (ACSMC) was installed along the z axis to improve scanning accuracy and overcome the inconvenience of conventional controllers. Phase feedback signals were also used to increase the sensitivity of scanning, while providing faster response times and superior image quality. A comprehensive series of experiments was performed to validate the performance of the proposed system.
    其他題名: TNANO
    出版者: New York: IEEE
    出版日期: 2014-07-01
    出處: IEEE transactions on nanotechnology, 2014-07, Vol.13 (4), p.639-649
    資源來源: IEEE Electronic Library (IEL)
    版權: Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Jul 2014
    識別號: ISSN: 1536-125X
    識別號: EISSN: 1941-0085
    識別號: DOI: 10.1109/TNANO.2014.2307073
    識別號: CODEN: ITNECU
    显示于类别:[電機工程學系] 期刊論文

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