Modeling and controller design of a precision hybrid scanner for application in large measurement-range atomic force microscopy

NCUIR > College of Electrical Engineering & Computer Science > Department of Electrical Engineering > journal & Dissertation > Item 987654321/107782

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/107782

Title:	Modeling and controller design of a precision hybrid scanner for application in large measurement-range atomic force microscopy
Authors:	吳俊緯;Wu, Jim-Wei;Huang, Kuan-Chia;Chiang, Ming-Li;Chen, Mei-Yung;Fu, Li-Chen
Contributors:	資訊電機學院電機工程學系
Keywords:	Adaptive complementary sliding-mode controller (SMC);Adaptive control systems;Atomic force microscopy;atomic force microscopy (AFM);cascaded-type control strategy;Design engineering;Disturbances;Dynamics;Electromagnetics;Force;Hysteresis;Mathematical model;Mathematical models;Measurement by laser beam;neural-network (NN) complementary SMC;Piezoelectric actuators;precision hybrid scanner;Scanning;scanning probe-type AFM system;Tapping;Uncertainty
Date:	2014-01-01
Issue Date:	2026-04-23 14:25:54 (UTC+8)
Publisher:	IEEE Industrial Electronics Society;New York: IEEE
Abstract:	摘要： In this paper, we have developed a novel large measurement-range atomic force microscopy (AFM) system performing the tapping mode operation. This system consists of a compact/low-cost scanning probe-type sensing system ( z-scanner) and a hybrid xy-scanner. To achieve precision measurement through image scan of given samples, a thorough mathematical modeling is established first, and an advanced robust adaptive controller is then proposed, which can deal with unknown parameters, cross-talk effects, external disturbances, and unknown hysteresis phenomena. The salient properties of the resulting closed-loop AFM system includes long traveling range, high precision, and fast response after integrating two kinds of actuations. To demonstrate and qualify the scanning capability of the proposed system, systematic experiments have been conducted. 其他題名： TIE 出版者： New York: IEEE 出版日期： 2014-07-01 出處： IEEE transactions on industrial electronics (1982), 2014-07, Vol.61 (7), p.3704-3712 資源來源： IEEE Electronic Library (IEL) 版權： Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Jul 2014 識別號： ISSN: 0278-0046 識別號： EISSN: 1557-9948 識別號： DOI: 10.1109/TIE.2013.2279352 識別號： CODEN: ITIED6
Appears in Collections:	[Department of Electrical Engineering] journal & Dissertation

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