Reduced interface States of atomic-layer-deposited Al2O3/AlGaN/GaN heterostructure containing in situ grown AlN/GaN cap layer and subjected to thermal oxidation

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Title:	Reduced interface States of atomic-layer-deposited Al2O3/AlGaN/GaN heterostructure containing in situ grown AlN/GaN cap layer and subjected to thermal oxidation
Authors:	綦振瀛;Liao, Wen-Chia;Chiang, Chen-Ting;Chyi, Jen-Inn;Hsin, Yue-Ming
Contributors:	資訊電機學院電機工程學系
Date:	2015-01-01
Issue Date:	2026-04-23 14:36:32 (UTC+8)
Publisher:	Electrochemical Society, Inc.;The Electrochemical Society
Abstract:	摘要： In this study, conventional multiple-frequency capacitance-voltage (C-V) curves of a metal-insulator-semiconductor structure were modified into barrier capacitance-barrier voltage (Cbr-Vbr) curves to study the interface state of an Al2O3/III-N interface. By eliminating the contribution of a serially connected insulator capacitance (Ci), the variation of Cbr as a function of Vbr could be obtained for determining the interface-state-caused dispersion precisely. This technique was used to deduce the distribution of energy-level-dependent Dit and to investigate the influence of thermal oxidization on an Al2O3/AlGaN/GaN heterostructure with an in situ grown AlN/GaN cap layer. The oxidization process was performed prior to Al2O3 deposition. Depositing an Al2O3 layer on an oxidized wafer by using an atomic layer deposition system can considerably reduce the dispersion behavior among frequency-dependent Cbr-Vbr curves. By determining the amount of frequency dispersion among the Cbr-Vbr curves, the distribution of Dit was determined to be in the range between 1.4 × 1012 and 2.6 × 1013 eV−1·cm−2, which was an approximately one-order-of-magnitude reduction compared with a structure that was not subjected to the oxidization process. 其他題名： J. Electrochem. Soc 出版者： The Electrochemical Society 出版日期： 2015-01-01 出處： Journal of the Electrochemical Society, 2015-01, Vol.162 (9), p.E160-E165 資源來源： Institute of Physics Journals 版權： 2015 The Electrochemical Society 識別號： ISSN: 0013-4651 識別號： EISSN: 1945-7111 識別號： DOI: 10.1149/2.0781509jes
Appears in Collections:	[Department of Electrical Engineering] journal & Dissertation

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