摘要： The piezoelectric biosensor have been widely used in ultra-small mass detection of biomolecular, based on PZT piezoelectric material can create a variety of compositions geometrically; it could widely develop a high-frequency resonator and measure the change of the slightest mass while improve the limited detection simultaneously. Therefore, the piezoelectric biosensor of this study was fabricated by a spin-coating method and backside etching process for improving the characteristic of piezoelectric biosensor. The result exhibited that the 250 μm × 250 μm working size has the most favorable piezoelectric characteristic. The tunability was approximately 38.56 % and it showed that reducing the substrate thickness could obtain a clear resonance signal in a range of 60 to 380 MHz. In theory calculated for gravimetric sensing, it could achieve 0.1 ng sensing sensitivity. In gravimetric sensing, the sensing range was between 50,000∼100,000 CFU/ml. Sensing range was lower in clinical urinary tract infection (100,000 CFU/ml), thus demonstrating its usefulness for preventive medicine. It can understand the piezoelectric sensor of this study has potential application in the future for biomedical gravimetric sensing. 其他題名： Biomed Mater Eng 出版者： London, England: SAGE Publications 出版日期： 2014-01-01 出處： Bio-medical materials and engineering, 2014-01, Vol.24 (6), p.3597-3604 資源來源： Openly Available Collection - Sage Journals 版權： IOS Press and the authors. 識別號： ISSN: 0959-2989 識別號： ISSN: 1878-3619 識別號： EISSN: 1878-3619 識別號： DOI: 10.3233/BME-141186 識別號： PMID: 25227073
