Single-mode vertical-cavity surface-emitting lasers array with ZN-diffusion aperture for high-power, single-spot, and narrow divergence angle performance

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Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/108252

Title:	Single-mode vertical-cavity surface-emitting lasers array with ZN-diffusion aperture for high-power, single-spot, and narrow divergence angle performance
Authors:	許晉瑋;Yen, Jia-Liang;Chi, Kai-Lun;Jiang, Jia-Wei;Yang, Ying-Jay;Shi, Jin-Wei
Contributors:	資訊電機學院電機工程學系
Keywords:	Apertures;Arrays;Beams (radiation);Current measurement;Divergence;Laser arrays;Optical variables measurement;Power generation;Semiconductor device measurement;Similarity;Vertical cavity surface emission lasers;Vertical cavity surface emitting lasers;Zinc
Date:	2014-01-01
Issue Date:	2026-04-23 14:40:28 (UTC+8)
Publisher:	Institute of Electrical and Electronics Engineers Inc.;New York: IEEE
Abstract:	摘要： A single-mode vertical-cavity surface-emitting laser (VCSEL) array at 850 nm with excellent performance in terms of high output power, single-lobe far-field, and narrow divergence angle has been demonstrated. By use of the Zn-diffusion process with proper sizes of oxide current-confined and Zn-diffusion optical apertures, each unit of VCSEL in the demonstrated array is highly single-mode (side-mode suppression ratio 30 dB) with a narrow far-field divergence angle (~5°) and an extremely high maximum single-mode output power (~7.1 mW). Due to the excellent single-mode performance of each VCSEL unit, the 10 × 10 array exhibits a single-lobe and nearly circular symmetric far-field pattern, very narrow divergence angle (~4°), and output power as high as around 187.4 mW. Furthermore, its bias-dependent output optical spectra measured in different positions of array shows very high similarity. This result indicates that the excellent uniformity of single-mode performance of each VCSEL unit in the array. The far-field pattern simulation results indicate that although the coherence in our array is low, its output beam quality is as high as that of a single-mode unit VCSEL, which exhibits a near diffraction limited M square factor (M 2 ≈ 2). 其他題名： JQE 出版者： New York: IEEE 出版日期： 2014-10-01 出處： IEEE journal of quantum electronics, 2014-10, Vol.50 (10), p.1-8 資源來源： IEEE Electronic Library (IEL) 版權： Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Oct 2014 識別號： ISSN: 0018-9197 識別號： EISSN: 1558-1713 識別號： DOI: 10.1109/JQE.2014.2345668 識別號： CODEN: IEJQA7
Appears in Collections:	[Department of Electrical Engineering] journal & Dissertation

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