Adjustable fluidic lenses for correcting piston/defocus/astigmatism aberrations induced by MEMS deformable mirrors

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题名:	Adjustable fluidic lenses for correcting piston/defocus/astigmatism aberrations induced by MEMS deformable mirrors
作者:	傅尹坤;Fuh, Yiin-Kuen;Hsu, Kuo-Chan;Lin, Ming-Xin;Fan, Jia-Ren
贡献者:	工學院機械工程學系
关键词:	aberrations;adjustable;fluidic lenses;micro-electrical-mechanical systems deformable mirrors;piston/defocus/astigmatism
日期:	2012-07-01
上传时间:	2026-04-23 14:41:50 (UTC+8)
出版者:	John Wiley and Sons Inc.;Hoboken: Wiley Subscription Services, Inc., A Wiley Company
摘要:	摘要： An adjustable fluidic lens is typically utilizing curvature change and is promising to correct the aberrations such as piston, defocus, and astigmatism. In this article, capability of adjustable fluidic lenses to correct the induced wavefront aberrations is investigated systematically, with particular attention placed on interpretation of Zernike modes and exploration of the potentials of fluidic lenses. In addition, aberrations are expressed in Zernike polynomials and the first six modes commonly encountered in ophthalmology are carefully examined. Three different wavefront aberrations are intentionally induced by a commercial micro‐electrical‐mechanical systems (MEMS) deformable mirrors (DM) with 140 actuators. The optical properties of fluidic lenses corrections are characterized by Shack–Hartmann measurements. Experimental results show that piston mode (Z1) can be significantly improved from 0.972 to −0.031 μm using fluidic lenses by injecting DI water as little as 0.02 ml (resultant meniscus curvature is 392.8 mm). Similar improvements can be found in defocus (Z5)/astigmatism (Z6) and aberrations are reduced for both modes from −0.15 μm/−0.48 μm to 0.02 μm/0.085 μm, respectively. When injected volume of 0.1 ml (resultant meniscus curvature is 78.9 mm), we can experimentally deduce that aberrations of Z3/Z5 induced by MEMS DM at a magnitude of 0.486 μm/−1.472 μm, fluidic lenses can only marginally improved to −0.245 μm/0.305 μm. © 2012 Wiley Periodicals, Inc. Microwave Opt Technol Lett 54:1701–1705, 2012; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.26878 其他題名： Microw. Opt. Technol. Lett 出版者： Hoboken: Wiley Subscription Services, Inc., A Wiley Company 出版日期： 2012-07 出處： Microwave and optical technology letters, 2012-07, Vol.54 (7), p.1701-1705 資源來源： Wiley Online Library 版權： Copyright © 2012 Wiley Periodicals, Inc. 識別號： ISSN: 0895-2477 識別號： EISSN: 1098-2760 識別號： DOI: 10.1002/mop.26878
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