Institute of Electrical and Electronics Engineers Inc.;New York: IEEE
摘要:
摘要: A three-degree-of-freedom (3-DOF) dynamic model-based intelligent nonsingular terminal sliding mode control (INTSMC) system is proposed in this study for the precision contours tracking of a gantry position stage. A Lagrangian equation-based 3-DOF dynamic model for the gantry position stage is derived first. Then, to minimize the synchronous error and tracking error in the precision contours tracking, the 3-DOF dynamic model-based INTSMC system is proposed. In this approach, a nonsingular terminal sliding mode control is designed for the gantry position stage to achieve finite time tracking control. Moreover, to increase the robustness and to improve the control performance, an interval type-2 recurrent fuzzy neural network, and asymmetric membership function, which combines the advantages of interval type-2 fuzzy logic system, recurrent neural network, and asymmetric membership function, is developed as an estimator to approximate a lumped uncertainty. Finally, some experimental results of the gantry position stage for optical inspection application are obtained to show the validity of the proposed control approach. 其他題名: TFUZZ 出版者: New York: IEEE 出版日期: 2012-10-01 出處: IEEE transactions on fuzzy systems, 2012-10, Vol.20 (5), p.971-985 資源來源: IEEE Electronic Library (IEL) 版權: Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Oct 2012 識別號: ISSN: 1063-6706 識別號: EISSN: 1941-0034 識別號: DOI: 10.1109/TFUZZ.2012.2191412 識別號: CODEN: IEFSEV