CMOS-compatible generation of self-organized 3-D Ge quantum dot array for photonic and thermoelectric applications

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Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/108474

Title:	CMOS-compatible generation of self-organized 3-D Ge quantum dot array for photonic and thermoelectric applications
Authors:	洪銘聰;Wang, Ching-Chi;Chen, Kuan-Hung;Chen, Inn-Hao;Lai, Wei-Ting;Chang, Hung-Tai;Chen, Wen-Yen;Hsu, Jung-Chao;Lee, Shen-Wei;Hsu, Tzu-Min;Hung, Ming-Tsung;Li, Pei-Wen
Contributors:	工學院機械工程學系
Keywords:	Applied sciences;Arrays;Circuit properties;Conductivity;Cross-disciplinary physics: materials science;rheology;Design. Technologies. Operation analysis. Testing;Electric, optical and optoelectronic circuits;Electronics;Exact sciences and technology;Ge quantum dot (QD);Integrated circuits;Integrated optics. Optical fibers and wave guides;Materials science;Nanoscale materials and structures: fabrication and characterization;Optical and optoelectronic circuits;Oxidation;photonics;Physics;Quantum dots;Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices;Silicon;Silicon germanium;thermoelectrics (TE);Three dimensional displays
Date:	2012-07-17
Issue Date:	2026-04-23 14:51:01 (UTC+8)
Publisher:	Institute of Electrical and Electronics Engineers Inc.;New York, NY: IEEE
Abstract:	摘要： We demonstrate a CMOS-compatible scheme, selective oxidation of SiGe pillars, for creating well-organized 3-D Ge quantum dot (QD) array by guiding QDs migration along the oxidation path and thus placing them on targeted locations where the ultimate oxidation occurs. Stacked QDs exhibit tunable luminescence over the visible and possess low thermal conductivity, showing promise for nanophotonic and energy conversion devices. 其他題名： TNANO 出版者： New York, NY: IEEE 出版日期： 2012-07-01 出處： IEEE transactions on nanotechnology, 2012-07, Vol.11 (4), p.657-660 資源來源： IEEE Electronic Library (IEL) 版權： 2015 INIST-CNRS 識別號： ISSN: 1536-125X 識別號： EISSN: 1941-0085 識別號： DOI: 10.1109/TNANO.2012.2202124 識別號： CODEN: ITNECU
Appears in Collections:	[Departmant of Mechanical Engineering ] journal & Dissertation

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