Development of an Angular Displacement Measurement by Birefringence Heterodyne Interferometry

NCUIR > Engineering College > Departmant of Mechanical Engineering > journal & Dissertation > Item 987654321/108615

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/108615

Title:	Development of an Angular Displacement Measurement by Birefringence Heterodyne Interferometry
Authors:	李朱育;Chen, Lin-Yu;Lee, Ju-Yi;Chang, Hung-Sheng;Yang, Yang
Contributors:	工學院機械工程學系
Keywords:	Angle measurement;Birefringence;Heterodyne interferometry
Date:	2015-01-01
Issue Date:	2026-04-23 14:59:05 (UTC+8)
Publisher:	Taylor and Francis Ltd.;Taylor & Francis
Abstract:	摘要： The birefringence heterodyne interferometry for the angular measurement is presented. The advantage of the instrument is the large measurement range and high resolution. When p- and s-polarized beams pass through a birefringence crystal, the phase difference between these two polarized beams is sensitive to the incident angle. We can determine the angular variation with the heterodyne interferometer which can precisely detect the phase difference between these two polarized beams. Moreover, a new optical path is designed to enhance the sensitivity by means of a prism which combines the light to the birefringence crystal. There are two measurement modes in our system, a linear and a circular polarized mode. The experimental results show that the resolution of the linear polarized mode is 1.2°×10 −4 and the resolution of the circular polarized mode is 3°×10 −5 . 出版者： Taylor & Francis 出版日期： 2015-01-01 出處： Smart science, 2015-01, Vol.3 (4), p.188-192 資源來源： Taylor & Francis Journals 版權： 2015 Taylor and Francis Group, LLC 2015 識別號： ISSN: 2308-0477 識別號： EISSN: 2308-0477 識別號： DOI: 10.1080/23080477.2015.11670490
Appears in Collections:	[Departmant of Mechanical Engineering ] journal & Dissertation

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